Dr. Saskia N. Biehl Profile

Dr. Saskia N. Biehl

Head of Micro & Sensor Technologies Group at Fraunhofer-IST

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Publications (4)

Proceedings Article | 31 May 2017 Presentation + Paper

Thin film system with integrated load and temperature sensors for the technical application in deep drawing process

Saskia Biehl, Nancy Paetsch, Eike Meyer-Kornblum

Proceedings Volume 10246, 102460O (2017) https://doi.org/10.1117/12.2265694

KEYWORDS: Sensors, Thin films, Temperature metrology, Deposition processes, System integration, Temperature sensors, Chemical elements, Complex systems, Plasma, Physical vapor deposition, Resistance, Carbon, Chromium, Coating, Multilayers

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Proceedings Article | 21 May 2015 Paper

Multifunctional thin film sensor system as monitoring system in production

Saskia Biehl, Christian Rumposch, Nancy Paetsch

Proceedings Volume 9517, 95170Y (2015) https://doi.org/10.1117/12.2178914

KEYWORDS: Sensors, Thin films, Resistance, Temperature metrology, Carbon, Polymers, Polymeric sensors, Chromium, Aluminum, Silicon

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Proceedings Article | 17 May 2013 Paper

Novel applications of piezoresistive thin film systems based on hydrogenated carbon

Saskia Biehl, Christian Rumposch, Christian Recknagel

Proceedings Volume 8763, 87630D (2013) https://doi.org/10.1117/12.2017374

KEYWORDS: Sensors, Thin films, Carbon, Coating, Spindles, Electrodes, Chromium, Resistance, Silicon, Silicon carbide

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Proceedings Article | 19 May 2009 Paper

Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems

Saskia Biehl, Sebastian Staufenbiel, Frank Hauschild

Proceedings Volume 7362, 73621J (2009) https://doi.org/10.1117/12.821729

KEYWORDS: Sensors, Thin films, Chromium, Carbon, Resistance, Photomasks, Polishing, Silicon, Silicon carbide, Coating

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