Mr. Saravana Prakash Shanmugasundaram Profile

Saravana Prakash Shanmugasundaram

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Publications (1)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

An accurate and robust after-develop overlay measurement solution using YieldStar multi-wavelength optical metrology accompanied by a precise application strategy

Pengzhen Zhang, Kai You, Pandeng Xuan, Yaobin Feng, Longfei Shen, Jolly Xu, Ji-Ling Hou, Saravana Prakash Shanmugasundaram, Summer Sui, Shiwei Ren, Chengkun Li, Jerry Fang, Toby Yu, Babak Mozooni

Proceedings Volume 11611, 116112U (2021) https://doi.org/10.1117/12.2583737

KEYWORDS: Overlay metrology, Optical metrology, Metrology, Lithography, High volume manufacturing, Etching, Diffraction

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