Dr. Sarah Bollanti Profile

Dr. Sarah Bollanti

at ENEA

SPIE Involvement:

Author

Publications (38)

Proceedings Article | 13 April 2020 Presentation + Paper

Accurate and low-cost ENEA solar compass for precision metrology of true azimuth: instrumental and smart versions

S. Bollanti, F. Andreoli, L. Cafarella, D. De Meis, P. Di Lazzaro, D. Di Mauro, F. Flora, G. P. Gallerano, L. Mezi, D. Murra, L. Murra, D. Vicca, G. Vicoli, A. Zirizzotti

Proceedings Volume 11352, 1135216 (2020) https://doi.org/10.1117/12.2555747

KEYWORDS: Sun, Sensors, Magnetism, Global Positioning System, Calibration

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Proceedings Article | 3 January 2019 Paper

The ENEA discharge produced plasma extreme ultraviolet source and its patterning applications

L. Mezi, S. Bollanti, S. Botti, G. Brusatin, L. Businaro, G. Della Giustina, P. Di Lazzaro, M. Fagnoni, F. Flora, A. Gerardino, D. Murra, S. Protti, A. Torre, E. Torti

Proceedings Volume 11042, 110420Z (2019) https://doi.org/10.1117/12.2522469

KEYWORDS: Extreme ultraviolet, Plasma, Graphene, Photomasks, Optical lithography, Extreme ultraviolet lithography, Spatial resolution, Silicon, Photoresist materials, Lithography

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Proceedings Article | 30 January 2013 Paper

Extreme ultraviolet marking system for anti-counterfeiting tags with adjustable security level

P. Di Lazzaro, S. Bollanti, F. Flora, L. Mezi, D. Murra, A. Torre, F. Bonfigli, R. M. Montereali, M. A. Vincenti

Proceedings Volume 8677, 86770T (2013) https://doi.org/10.1117/12.2010400

KEYWORDS: Extreme ultraviolet, Laser induced fluorescence, Extreme ultraviolet lithography, Photomasks, Patents, Microscopes, Luminescence, Transistors, Ultraviolet radiation, Adhesives

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Proceedings Article | 22 April 2009 Paper

A laser-plasma clean soft x-ray source for projection microlithography

S. Bollanti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre

Proceedings Volume 7131, 713116 (2009) https://doi.org/10.1117/12.816912

KEYWORDS: Mirrors, Extreme ultraviolet, Photomasks, Projection lithography, Plasmas, Projection systems, X-ray sources, Krypton, Laser development, Optical filters

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Proceedings Article | 2 October 2007 Paper

Progress report on a 14.4-nm micro-exposure tool based on a laser-produced-plasma: debris mitigation system results and other issues

S. Bollanti, D. Amodio, A. Conti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre, C. Zheng, D. Garoli, M. Pelizzo, P. Nicolosi, V. Mattarello, V. Rigato, A. Gerardino

Proceedings Volume 6703, 670308 (2007) https://doi.org/10.1117/12.751442

KEYWORDS: Mirrors, Krypton, Argon, Extreme ultraviolet, Fluctuations and noise, Reflectivity, Plasma, Extreme ultraviolet lithography, Glasses, Copper

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Proceedings Article | 26 April 2007 Paper

Excimer-laser-driven EUV plasma source for one-shot one-pattern projection microlithography

P. Di Lazzaro, G. Altieri, D. Amodio, S. Bollanti, A. Conti, F. Flora, T. Letardi, L. Mezi, D. Murra, E. Tefouet Kana, A. Torre, C. E. Zheng

Proceedings Volume 6346, 63460M (2007) https://doi.org/10.1117/12.738084

KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Extreme ultraviolet lithography, Databases, Excimer lasers, X-rays, Pulsed laser operation, Photoresist materials, Prototyping

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Proceedings Article | 15 October 2005 Paper

Mask tilt effects counteracted by wafer tilts in a Schwarzschild objective based EUV lithography setup

S. Bollanti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre

Proceedings Volume 5962, 59622Y (2005) https://doi.org/10.1117/12.624845

KEYWORDS: Photomasks, Semiconducting wafers, Extreme ultraviolet lithography, Mirrors, Wafer-level optics, Zemax, Solids, Extreme ultraviolet, Image resolution, Microscopes

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Proceedings Article | 12 October 2005 Paper

Recent results of laser-driven EUV and soft x-rays plasma source at ENEA Frascati

P. Di Lazzaro, S. Bollanti, A. Conti, F. Flora, L. Mezi, D. Murra, C. Zheng

Proceedings Volume 5958, 595814 (2005) https://doi.org/10.1117/12.621079

KEYWORDS: Plasma, Krypton, Extreme ultraviolet, Tantalum, Pulsed laser operation, Copper, Ions, X-rays, Excimer lasers, Solids

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Proceedings Article | 23 March 2005 Paper

Beam homogenization: theory, modeling, and application to an excimer laser beam

E. Tefouet Kana, S. Bollanti, P. Di Lazzaro, D. Murra

Proceedings Volume 5777, (2005) https://doi.org/10.1117/12.611252

KEYWORDS: Zoom lenses, Homogenization, CCD cameras, Excimer lasers, Beam splitters, Modeling, Geometrical optics, Wavefronts, Charge-coupled devices, Beam shaping

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Proceedings Article | 23 March 2005 Paper

Flat-top shaped laser beams: reliability of standard parameters

P. Di Lazzaro, S. Bollanti, D. Murra, E. Tefouet Kana, G. Felici

Proceedings Volume 5777, (2005) https://doi.org/10.1117/12.611248

KEYWORDS: Standards development, Beam shaping, Reliability, Nd:YAG lasers, Excimer lasers, Zoom lenses, Near field, Excimers, CCD cameras, Modulation

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Proceedings Article | 7 January 2004 Paper

Highly efficient x-ray imaging and backlighting schemes based on spherically bent crystals

Tatiana Pikuz, Anatoly Faenov, Igor Skobelev, Alexandr Magunov, Manuel Sanchez del Rio, Lucia Alianelli, Giuseppe Baldacchini, Francesco Flora, Sarra Bollanti, Paulo Di Lazzaro, Daniele Murra, Giuseppe Tomassetti, Antonio Ritucci, Armando Reale, Lucia Reale, Massimo Francucci, Sergio Martellucci, Giovanni Petrocelli

Proceedings Volume 5196, (2004) https://doi.org/10.1117/12.503580

KEYWORDS: Crystals, Plasma, Spatial resolution, X-ray imaging, X-rays, Sensors, Monochromatic aberrations, Spherical lenses, Mica, Magnesium

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Proceedings Article | 14 November 2003 Paper

A laser beam homogenizer with a variable output cross section

Daniele Murra, Paolo Di Lazzaro, Sarah Bollanti, Giuseppe Felici

Proceedings Volume 5147, (2003) https://doi.org/10.1117/12.537572

KEYWORDS: Zoom lenses, Optical components, Excimer lasers, Silicon, Software development, Near field, Laser applications, Spherical lenses, Geometrical optics, CCD cameras

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Proceedings Article | 10 November 2003 Paper

A novel light beam homogenizer

Paolo Di Lazzaro, S. Bollanti, D. Murra, G. Felici

Proceedings Volume 5120, (2003) https://doi.org/10.1117/12.515490

KEYWORDS: Beam shaping, Zoom lenses, Lenses, Excimer lasers, Charge-coupled devices, Optical design, Optical components, Semiconductor lasers, Beam homogenizers, Near field

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Proceedings Article | 9 April 2003 Paper

New light-beam homogenizer technology

Paolo Di Lazzaro, Sarah Bollanti, Giuseppe Felici, Daniele Murra

Proceedings Volume 5131, (2003) https://doi.org/10.1117/12.513517

KEYWORDS: Beam shaping, Zoom lenses, Lenses, Excimer lasers, Charge-coupled devices, Optical design, Optical components, Patents, Laser applications, Semiconductor lasers

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Proceedings Article | 9 April 2003 Paper

Considerations about self-filtering unstable resonators

Sarah Bollanti, Paolo Di Lazzaro, Daniele Murra, Cheng En Zheng

Proceedings Volume 5131, (2003) https://doi.org/10.1117/12.513678

KEYWORDS: Resonators, Mirrors, Confocal microscopy, Optical resonators, Diffraction, Laser resonators, Sinc filters, Laser applications, Geometrical optics, Gas lasers

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Proceedings Article | 14 November 2001 Paper

Novel portable high-luminosity monochromatically tunable x-ray microscope

Francesco Flora, Sarah Bollanti, A. Lai, Paolo Di Lazzaro, Tommaso Letardi, Antonio Grilli, Libero Palladino, Giuseppe Tomassetti, Armando Reale, Lucia Reale, Anna Scafati, L. Baccehtta, Lucia Alianelli, Manuel Sanchez del Rio, Tatiana Pikuz, Anatoly Faenov

Proceedings Volume 4504, (2001) https://doi.org/10.1117/12.448472

KEYWORDS: Crystals, X-rays, Spatial resolution, Microscopes, X-ray sources, Sensors, X-ray imaging, Plasmas, Laser crystals, Ray tracing

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Proceedings Article | 14 November 2001 Paper

Krypton as filter for ions, debris, and useless radiation in EUV projection lithography systems

Francesco Flora, Luca Mezi, Sarah Bollanti, Francesca Bonfigli, Paolo Di Lazzaro, Tommaso Letardi, Cheng En Zheng

Proceedings Volume 4504, (2001) https://doi.org/10.1117/12.448452

KEYWORDS: Krypton, Ions, Extreme ultraviolet, Tantalum, Copper, Mirrors, Plasmas, Glasses, Clouds, Helium

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Proceedings Article | 25 January 2001 Paper

Amorphous silicon crystallization by a long-pulse excimer laser

Paolo Di Lazzaro, Sarah Bollanti, Francesca Bonfigli, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Daniele Murra, Cheng En Zheng, Alessandro Baldesi

Proceedings Volume 4184, (2001) https://doi.org/10.1117/12.413991

KEYWORDS: Amorphous silicon, Excimer lasers, Crystals, Laser crystals, Annealing, Silicon, Laser energy, Zoom lenses, Glasses, X-rays

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Proceedings Article | 3 April 2000 Paper

Beam quality of a XeCl excimer laser vs. the repetition rate

Paolo Di Lazzaro, Sarah Bollanti, Francesca Bonfigli, Francesco Flora, Tommaso Letardi, Daniele Murra

Proceedings Volume 3889, (2000) https://doi.org/10.1117/12.380907

KEYWORDS: Pulsed laser operation, Near field, Excimer lasers, Mirrors, Resonators, Laser energy, Oscillators, Ultraviolet radiation, Laser beam diagnostics, Laser resonators

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Proceedings Article | 25 February 2000 Paper

Experimental results on silicon annealing by a long-pulse high-power XeCl laser system

Daniele Murra, Sarah Bollanti, Francesca Bonfigli, D. Della Sala, Paolo Di Lazzaro, Tommaso Letardi

Proceedings Volume 4070, (2000) https://doi.org/10.1117/12.378178

KEYWORDS: Silicon, Semiconductor lasers, Annealing, Amorphous silicon, Excimer lasers, Pulsed laser operation, High power lasers, Glasses, Laser energy, Copper

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Proceedings Article | 7 February 2000 Paper

Industrial large-aperture XeCl laser for surface processing

Tommaso Letardi, Alessandro Baldesi, Sarah Bollanti, Francesca Bonfigli, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Alessandro Marinai, Daniele Murra, Giovanni Schina, Cheng En Zheng

Proceedings Volume 3888, (2000) https://doi.org/10.1117/12.377068

KEYWORDS: X-rays, Silicon, Diodes, Semiconductor lasers, Amorphous silicon, Laser sources, Pulsed laser operation, Copper, Capacitors, Gas lasers

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Proceedings Article | 23 November 1999 Paper

Large-field high-resolution x-ray monochromatic microscope based on spherical crystals and high-repetition-rate laser-produced plasmas

Tatiana Pikuz, Anatoly Faenov, Moshe Fraenkel, Arie Zigler, Francesco Flora, Sarah Bollanti, Paolo Di Lazzaro, Tommaso Letardi, Antonio Grilli, Libero Palladino, Giuseppe Tomassetti, Armando Reale, Lucia Reale, Anna Scafati, Tania Limongi, Francesca Bonfigli

Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371143

KEYWORDS: Crystals, X-rays, Microscopes, Plasmas, X-ray sources, Laser crystals, Spatial resolution, X-ray imaging, X-ray optics, Mica

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Proceedings Article | 23 November 1999 Paper

Toward a high-average-power and debris-free soft x-ray source for microlithography pumped by a long-pulse excimer laser

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Tommaso Letardi, Alessandro Marinai, Alessandro Nottola, Kostandia Vigli-Papadaki, A. Vitali, Francesca Bonfigli, Nicola Lisi, Libero Palladino, Armando Reale, Cheng En Zheng

Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371128

KEYWORDS: X-rays, Plasma, Pulsed laser operation, Tantalum, Excimer lasers, CCD cameras, Ions, Copper, Mirrors, Solids

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Proceedings Article | 30 December 1998 Paper

Soft x-ray plasma source pumped by an excimer laser: optimization and applications

Patrizia Albertano, Mauro Belli, Sarah Bollanti, Paolo Di Lazzaro, Anatoly Faenov, Francesco Flora, Gualtiero Giordano, Antonio Grilli, Fiorenza Ianzini, Sergei Kukhlevsky, Tommaso Letardi, Alessandro Marinai, Alessandro Nottola, Libero Palladino, Tatiana Pikuz, Armando Reale, Lucia Reale, Anna Scafati, Giovanni Schina, Maria Tabocchini, I. C. Edmond Turcu, Kostandia Vigli-Papadaki

Proceedings Volume 3683, (1998) https://doi.org/10.1117/12.334808

KEYWORDS: X-rays, Plasma, X-ray microscopy, X-ray sources, Pulsed laser operation, Helium, Copper, Excimer lasers, Aluminum, Atmospheric plasma

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Proceedings Article | 22 December 1998 Paper

X-ray diode with spark plug plasma cathodes

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Daniele Murra, Giovanni Schina, Cheng En Zheng

Proceedings Volume 3574, (1998) https://doi.org/10.1117/12.334409

KEYWORDS: Diodes, X-rays, Plasma, Surface plasmons, Capacitors, Astatine, Ionization, Electrodes, Gas lasers, Excimer lasers

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Proceedings Article | 14 July 1998 Paper

Applications of an x-ray plasma source driven by an excimer laser: in vivo microscopy, microradiography, and radiobiology

Sarah Bollanti, Robin Cotton, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Giovanni Schina, Tommaso Letardi, Nicola Lisi, Alessandro Nottola, Kostandia Vigli-Papadaki, Armando Reale, Libero Palladino, Lucia Reale, Mauro Belli, Fiorenza Ianzini, M. Tobocchini, Anna Scafati, Anatoly Faenov, Tatiana Pikuz, Patrizia Albertano

Proceedings Volume 3423, (1998) https://doi.org/10.1117/12.316625

KEYWORDS: X-rays, X-ray microscopy, Plasma, X-ray sources, Microscopy, Excimer lasers, Helium, Atmospheric plasma, Copper, Pulsed laser operation

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Proceedings Article | 14 July 1998 Paper

Definition and measurement of the times-diffraction-limit number of high-power laser beams

Sarah Bollanti, Paolo Di Lazzaro, Daniele Murra

Proceedings Volume 3423, (1998) https://doi.org/10.1117/12.316570

KEYWORDS: Diffraction, Beam shaping, Near field, Resonators, Laser systems engineering, High power lasers, Fourier transforms, Excimer lasers, Mirrors, Optical testing

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Proceedings Article | 4 April 1997 Paper

Comparison of beam quality parameters of two high-peak power eximer laser beams

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Giovanni Schina, Daniele Murra, C. Petrucci, Olivier Uteza, Cheng En Zheng

Proceedings Volume 3092, (1997) https://doi.org/10.1117/12.270259

KEYWORDS: Excimer lasers, Optical testing, Laser systems engineering, Resonators, Near field, Fourier transforms, Solids, Laser resonators, Pulsed laser operation, Confocal microscopy

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Proceedings Article | 20 November 1996 Paper

Beam quality characterization and times-diffraction-limit estimation of two high-power excimer lasers

Sarah Bollanti, Paolo Di Lazzaro, Daniele Murra

Proceedings Volume 2870, (1996) https://doi.org/10.1117/12.259919

KEYWORDS: Near field, Beam analyzers, Solids, Beam shaping, Resonators, Spatial coherence, Excimer lasers, Laser systems engineering, Fourier transforms, High power lasers

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Proceedings Article | 26 August 1996 Paper

Near-diffraction-limited excimer laser beam from a XeCl POPA system

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Daniele Murra, C. Petrucci, Giovanni Schina, Olivier Uteza, Cheng En Zheng

Proceedings Volume 2788, (1996) https://doi.org/10.1117/12.248600

KEYWORDS: Oscillators, Diffraction, Near field, Excimer lasers, Resonators, Mirrors, Optical testing, Optical amplifiers, Gas lasers, Beam shaping

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Proceedings Article | 18 September 1995 Paper

X-ray contact microscopy using a plasma source generated by long and short (120-ns and 10-ns) excimer laser pulses

Robin Cotton, Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Nicola Lisi, Tommaso Letardi, Libero Palladino, Armando Reale, Dimitri Batani, Aldo Conti, A. Mauri, M. Moret, Lucia Reale, Patrizia Albertano, Antonio Grilli

Proceedings Volume 2523, (1995) https://doi.org/10.1117/12.220977

KEYWORDS: X-rays, X-ray imaging, X-ray microscopy, Microscopy, Plasma, Photoresist developing, Image resolution, Pulsed laser operation, Copper, Atomic force microscopy

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Proceedings Article | 18 September 1995 Paper

Characteristics of a soft x-ray plasma source for different pumping laser configurations and spectral analysis

Sarah Bollanti, Robin Cotton, Paolo Di Lazzaro, Francesco Flora, Tommaso Letardi, Nicola Lisi, Dimitri Batani, Aldo Conti, A. Mauri, Libero Palladino, Armando Reale, Anatoly Faenov, Tatiana Pikuz, Albert Osterheld

Proceedings Volume 2523, (1995) https://doi.org/10.1117/12.220998

KEYWORDS: X-rays, Pulsed laser operation, Plasma, Copper, X-ray sources, Excimer lasers, Solids, Optical amplifiers, Photons, X-ray microscopy

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Proceedings Article | 16 August 1994 Paper

Compact three-electrodes excimer laser IANUS for a POPA optical system

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, C. Petrucci, Giovanni Schina, Cheng En Zheng

Proceedings Volume 2206, (1994) https://doi.org/10.1117/12.184577

KEYWORDS: Electrodes, Mirrors, Pulsed laser operation, Resonators, Oscillators, Near field, Diffraction, Solids, Excimer lasers, Gas lasers

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Proceedings Article | 4 May 1993 Paper

Excimer laser development and applications at the ENEA Frascati Centre

Tommaso Letardi, Sarah Bollanti, Paolo Di Lazzaro, Honglie Fang, Francesco Flora, Shufen Fu, A. Gerardino, Gualtiero Giordano, Nicola Lisi, Luca Mezi, Giovanni Schina, Amalia Torre, Cheng En Zheng

Proceedings Volume 1810, (1993) https://doi.org/10.1117/12.144661

KEYWORDS: X-rays, Laser development, Excimer lasers, Electrodes, Pulsed laser operation, Chemical lasers, Diodes, Switching, Excimers, Lasers

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Proceedings Article | 4 May 1993 Paper

High-brightness excimer laser source applied in soft x-ray generation

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, M. Portaccio, Giovanni Schina, Cheng En Zheng, Libero Palladino, Armando Reale, G. Taglieri, Dimitri Batani, Mauro Belli, Anna Scafati

Proceedings Volume 1810, (1993) https://doi.org/10.1117/12.144571

KEYWORDS: X-rays, Aluminum, Plasma, Optical filters, PIN photodiodes, Resonators, Mirrors, Pulsed laser operation, Excimer lasers, Laser energy

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Proceedings Article | 1 September 1991 Paper

Excimer laser development at the ENEA Frascati Centre: discharge instabilities study

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Shufen Fu, Gualtiero Giordano, Tommaso Letardi, Nicola Lisi, Giovanni Schina, Cheng En Zheng

Proceedings Volume 1503, (1991) https://doi.org/10.1117/12.46917

KEYWORDS: Excimer lasers, Pulsed laser operation, Xenon, Laser development, X-rays, Prototyping, Human-computer interaction, Laser beam diagnostics, High power lasers, Light sources

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Proceedings Article | 1 February 1991 Paper

Large volume XeCl laser with longitudinal gas flow: experimental results and theoretical analysis

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Nicola Lisi, Giovanni Schina, Cheng En Zheng

Proceedings Volume 1397, (1991) https://doi.org/10.1117/12.25971

KEYWORDS: Gas lasers, Pulsed laser operation, Xenon, X-rays, Chemical lasers, Electrodes, Aluminum, X-ray optics, Laser stabilization, Laser beam diagnostics

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Proceedings Article | 1 August 1990 Paper

Operation of a 10-L discharge XeCl laser

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, A. Gerardino, Gualtiero Giordano, Tommaso Letardi, Nicola Lisi, Giovanni Schina, Cheng En Zheng

Proceedings Volume 1278, (1990) https://doi.org/10.1117/12.20599

KEYWORDS: X-rays, Excimer lasers, Diodes, Pulsed laser operation, Electrons, X-ray optics, X-ray lasers, Gas lasers, Electrodes, Laser energy

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