BAE Systems continues to make dramatic progress in uncooled microbolometer sensors and applications. This paper
will review the latest advancements in microbolometer technology at BAE Systems, including the development status of
17 micrometer pixel pitch detectors and imaging modules which are entering production and will be finding their way
into BAE Systems products and applications. Benefits include increased die per wafer and potential benefits to SWAP
for many applications. Applications include thermal weapons sights, thermal imaging modules for remote weapon
stations, vehicle situational awareness sensors and mast/pole mounted sensors.
KEYWORDS: Staring arrays, Microbolometers, Long wavelength infrared, Bolometers, Fluctuations and noise, Infrared radiation, Data modeling, Standards development, Systems modeling, Visual process modeling
BAE Systems has continued to advance its 17 μm pitch LWIR 640 x 480 microbolometer technology with
improvements in pixel performance and initial production for several emerging products. In addition, we have
developed short time constant variants of our standard pixel design to support applications requiring short thermal time
constants. The technology is expanding to include a 1024x768 format megapixel FPA to support higher resolution
applications.
BAE Systems has advanced its 17 μm pitch LWIR 640 x 480 microbolometer
technology with improvements in pixel performance and introduction of a new 17 μm
pitch ROIC. We have fabricated, characterized, and demonstrated high-yielding 17 μm
pitch FPAs using our new ROIC, and have successfully demonstrated them at the system
level. This new technology builds on our 28 μm FPA production experience and
implements our high-performance single-level microbolometer process at 17 μm pitch.
We present initial results and imagery. These 17 μm FPAs have exceptional
performance and provide the path to next generation microbolometer applications.
This paper examines using an optical endpoint system to control over etching of a complex spacer such as the L-shaped spacer. The endpoint detection system (EPD 202) was used to monitor the etch chemistry on the TEL Unity II e plasma etcher. EPD202 monitors the chemistry change at the top tetraethylorthosilicate (TEOS)/nitride interface and the underlying nitride/TEOS interface. Therefore, a plasma change (film change) is detected twice by the EPD202 monitoring system. This optical double endpoint algorithm reduces the possibility of over etching the layers regardless of the incoming film variations. Verification of module improvement using the endpoint algorithm, instead of the time etch, was collected by inline Tencor 1270 TUV measurements and Scanning Electron Microscope (SEM) cross-sections. The EPD202 system improved etch uniformity by 44%, thereby implying an increase in the repeatability of the gate spacer and overall reliability of the product.
The estimated 3.7 million Americans with low vision experience a uniquely difficult task in identifying the denominations of U.S. banknotes because the notes are remarkably uniform in size, color, and general design. The National Research Council's Committee on Currency Features Usable by the Visually Impaired assessed features that could be used by people who are visually disabled to distinguish currency from other documents and to denominate and authenticate banknotes using available technology. Variation of length and height, introduction of large numerals on a uniform, high-contrast background, use of different colors for each of the six denominations printed, and the introduction of overt denomination codes that could lead to development of effective, low-cost devices for examining banknotes were all deemed features available now. Issues affecting performance, including the science of visual and tactile perception, were addressed for these features, as well as for those features requiring additional research and development. In this group the committee included durable tactile features such as those printed with transparent ink, and the production of currency with holes to indicate denomination. Among long-range approaches considered were the development of technologically advanced devices and smart money.
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