Dr. Sandeep Kohli Profile

Dr. Sandeep Kohli

Manager at Zygo Corporation

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Author

Publications (8)

Proceedings Article | 14 June 2023 Presentation + Paper

Salt spray resistant silver coatings for aerospace and defense applications

Robert Moore, Hilario Torres, Richard DeLuca, Michael Gentile, Katy Csády Zadrovicz, Michael Albrecht, Sandeep Kohli

Proceedings Volume 12530, 125300C (2023) https://doi.org/10.1117/12.2663465

KEYWORDS: Silver, Corrosion, Metals, Protective coatings, Reflectivity, Optical coatings, Oxidation

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Proceedings Article | 4 March 2022 Open Access

Laser damage properties of Al2O3/MgF2 antireflection coatings on large, curved substrates at 248 nm

Nasir Merchant, Richard DeLuca, Michael Gentile, Sandeep Kohli, Katy Csády Zadrovicz, Michael Albrecht

Proceedings Volume 11982, 119820C (2022) https://doi.org/10.1117/12.2610006

KEYWORDS: Antireflective coatings, Optical coatings, Laser induced damage, Laser damage threshold, Reflectivity, Optics manufacturing, Lithography

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Proceedings Article | 26 September 2019 Paper

Interfacial quality of high-reflectivity Mo-Si multilayers for EUV mask blanks

Narasimhan Srinivasan, Katrina Rook, Paul Turner, Tania Henry, Kenji Yamamoto, Devlin Donnelly, Thu Van Nguyen, Vincent Ip, Meng Lee, Sandeep Kohli, Frank Cerio, Adrian Devahasayam

Proceedings Volume 11147, 111470N (2019) https://doi.org/10.1117/12.2536935

KEYWORDS: Silicon, Molybdenum, Multilayers, Extreme ultraviolet, Atomic force microscopy, Photomasks, Surface roughness, Ion beams, Reflectivity, Interfaces

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Proceedings Article | 26 March 2019 Presentation + Paper

Ion beam etching of new absorber materials for sub-5nm EUV masks

Narasimhan Srinivasan, Katrina Rook, Vincent Ip, Meng Lee, Sandeep Kohli, Frank Cerio, Adrian Devasahayam

Proceedings Volume 10957, 109570O (2019) https://doi.org/10.1117/12.2515098

KEYWORDS: Etching, Ion beams, Photomasks, Extreme ultraviolet, Nickel, Optical lithography, Ruthenium, Critical dimension metrology, Ions, Cobalt

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Proceedings Article | 3 October 2018 Presentation + Paper

Ion beam processing for critical EUV photomask process steps: mask blank deposition and photomask absorber etch

Katrina Rook, Meng Lee, Narasimhan Srinivasan, Vincent Ip, Sandeep Kohli, Mathew Levoso, Frank Cerio, Adrian Devasahayam

Proceedings Volume 10809, 108090F (2018) https://doi.org/10.1117/12.2501832

KEYWORDS: Etching, Ruthenium, Nickel, Ion beams, Extreme ultraviolet, Photomasks, Optical lithography, Ions, Photoresist materials, Multilayers

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Proceedings Article | 23 September 2015 Paper

Optical monitoring of high throughput ion beam sputtering deposition

Ove Lyngnes, Ulf Brauneck, Jinsong Wang, Ralf Erz, Sandeep Kohli, Binyamin Rubin, James Kraus, David Deakins

Proceedings Volume 9627, 962715 (2015) https://doi.org/10.1117/12.2194090

KEYWORDS: Bandpass filters, Coating, Optical filters, Spectral resolution, Sputter deposition, Planets, Linear filtering, Electronic filtering, Ion beams, Control systems

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Proceedings Article | 29 September 2004 Paper

Investigation of damage threshold of ion beam deposited oxide thin film optics for high-peak-power short-pulse lasers

Ann Fitzgerald Dummer, Fernando Brizuela, Charissa Duskis, Brad Luther, Miguel Larotonda, Jorge Rocca, Jason George, Sandeep Kohli, Pat McCurdy, Carmen Menoni

Proceedings Volume 5527, (2004) https://doi.org/10.1117/12.559903

KEYWORDS: Laser damage threshold, Multilayers, Ion beams, Aluminum, Oxides, Tantalum, Reflectivity, Sputter deposition, Thin films, Laser systems engineering

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Proceedings Article | 24 November 2003 Paper

Nanocrystal formation in thermally oxidized and annealed a-Si:H films and SiOxNy films (x=0.17; y=0.07)

Sandeep Kohli, Jeremy Theil, Rick Snyder, Christopher Rithner, Peter Dorhout

Proceedings Volume 5224, (2003) https://doi.org/10.1117/12.501706

KEYWORDS: Silicon, Silicon films, Nanocrystals, Crystals, Annealing, Temperature metrology, Oxides, Thermal oxidation, Nitrogen, Oxidation

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Showing 5 of 8 publications

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