Ryotaro Takahashi
at Ushio Inc
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 9 February 2024
JM3, Vol. 23, Issue 01, 011005, (February 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.1.011005
KEYWORDS: Lithography, Copper, Overlay metrology, Optical alignment, Optical lithography, Thermal deformation, Deformation, Film thickness, Etching, Miniaturization

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11327, 113270N (2020) https://doi.org/10.1117/12.2551577
KEYWORDS: Packaging, Optical lithography, Lithography, Copper, Silicon, Semiconductors, Scanning electron microscopy, Photomasks, Metals, Wet etching

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