We have studied a Si photonics non-mechanical beam steering device for LiDARs. We exploit a doubly periodic Si photonic crystal waveguide (PCW) with a collimator lens, which emits a single-peaked optical beam. Thanks to the slow light effect in the PCW, wide range beam steering can be obtained in the longitudinal direction with maintaining a small beam divergence by a small change of the wavelength and/or index of the PCW. However, due to the symmetric crosssection of the PCW, the emission occurs in both upward and downward directions, which causes a 3-dB loss in the transmission of the optical beam. The downward beam is partly reflected by the substrate, and the reflected beam interferes with the upward beam and modifies the far field pattern, which further increases the loss at particular beam angles. In LiDARs, this loss is repeated at the reception of returned light, resulting in a severe loss penalty. In this study, we investigated the unidirectional upward emission in some PCW structures with vertical asymmetries. We found theoretically that a shallow etched grating on top of the Si layer, which overlaps with the PCW holes significantly increases the upward emission. We fabricated such a device using Si photonics CMOS process and observed 2-8 times stronger upward emission as compared with that of the symmetric PCW. Furthermore, we integrated 32 PCWs in parallel configuration and selected one working PCW so that its relative position against a collimator lens is switched and the beam is steered in the lateral direction. We observed over 400×32 resolution points.
The optical beam steering device is essential for LiDARs and non-mechanical ones have been developed extensively. We have studied the one based on a Si photonic crystal waveguide (PCW) that guides slow light. In LiDARs, the beam hits a distant object. Then, reflected light is scattered hemispherically and a part of it is returned and received by the PCW. In this process, a long PCW aperture is expected to increase the reception intensity. However, since the PCW has a propagation loss of the order of 10 dB/cm, the reception intensity is not increased by simply lengthening the PCW. In this study, in order to suppress the total loss of the PCW, we proposed and fabricated a serial array of PCWs, in which light is received by multiple and short PCWs and then summed by using Si wire waveguide and coupler. We first estimate the transmission and reception characteristics of the PCW array. The effective aperture radiating light is lengthened by dividing the PCW, so the beam divergence becomes small and the reception intensity is improved. Also, we measured the transmission characteristics of the PCW array. We obtained a 0.046° beam divergence by controlling the phase between the PCWs. In the beam steering by the wavelength scanning or heating, we confirmed that the phase matching angular step appears stepwise. If we use the angular step as a resolution point, we can obtain the beam steering without the phase control.
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