Defects in master and replica waveguide gratings can cause image quality issues on AR displays. Characterizing these gratings is difficult due to their small features, which can be smaller than the wavelength of visible light. Microscopy is unsuitable for production testing as it lacks resolution and can be destructive. The authors propose an optical metrology setup using Littrow configuration to accurately measure diffraction grating pitch and orientation at a picometer and arcsecond scale to identify defects. The authors will also demonstrate the impact of grating analysis on the image quality of diffractive waveguides.
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