Requirements of surface quality of silicon wafer are increasingly restrict. Many investigations have been done to inspect defects on silicon wafer. However, rare studies have been reported on defect components inspection which is also critical to trace to the source of defects and monitor the manufacture processes in time. In order to inspect the components of contaminated particles on silicon wafer, especially with a high speed and in line mode, dual nanosecond pulse laser system both wavelengths at 532nm is designed in which one laser pumps the particles away from wafer surface almost without damage, the other laser breakdowns the particles in air above the wafer surface to obtain the emission lines of the contaminated particles by a spectroscopy with CCD. The sensitivity of the dual pulse laser system is evaluated.
In the case of industrial field measurement, the present measuring instruments work with manual operation and collimation, which give rise to low efficiency for field measurement. In order to solve the problem, a new type industrial total station is presented in this paper. The new instrument can identify and trace cooperative target automatically, in the mean time, coordinate of the target is measured in real time. For realizing the system, key technology including high precision absolutely distance measurement, small high accuracy angle measurement, target automatic collimation with vision, and quick precise controlling should be worked out. After customized system assemblage and adjustment, the new type industrial total station will be established. As the experiments demonstrated, the coordinate accuracy of the instrument is under 15ppm in the distance of 60m, which proved that the measuring system is feasible. The result showed that the total station can satisfy most industrial field measurement requirements.
Spectrally resolved interferometry (SRI) technology is a high precision laser interferometry technology, whose short non-ambiguity range (NAR) increases the precision requirement of pre-measurement in absolute distance measurement. In order to improve NAR of femtosecond laser SRI, the factors affecting NAR are studied in measurement system, and synthetic NAR method is presented based on excess fraction method to solve this question. A theoretical analysis is implemented and two Fabry-Perot Etalons with different free spectral range are selected to carry out digital simulation experiments. The experiment shows that NAR can be improved using synthetic NAR method and the precision is the same with that of fundamental femtosecond laser SRI.
Frequency-sweep polarization modulation ranging uses a polarization-modulated laser beam to determine the distance to the target, the modulation frequency is swept and frequency values are measured when transmitted and received signals are in phase, thus the distance can be calculated through these values. This method gets much higher theoretical measuring accuracy than phase difference method because of the prevention of phase measurement. However, actual accuracy of the system is limited since additional phase retardation occurs in the measuring optical path when optical elements are imperfectly processed and installed. In this paper, working principle of frequency sweep polarization modulation ranging method is analyzed, transmission model of polarization state in light path is built based on the theory of Jones Matrix, additional phase retardation of λ/4 wave plate and PBS, their impact on measuring performance is analyzed. Theoretical results show that wave plate’s azimuth error dominates the limitation of ranging accuracy. According to the system design index, element tolerance and error correcting method of system is proposed, ranging system is built and ranging experiment is performed. Experiential results show that with proposed tolerance, the system can satisfy the accuracy requirement. The present work has a guide value for further research about system design and error distribution.
The space-based long-distance ranging of space debris will help to avoid collision.
Compared with radar and telescope, the infrared binocular monitoring system can track and
range space debris quickly. Because the measurement range is related to the baseline length, two
cameras are placed on different satellites. Due to the lack of rigid connection between satellites,
femtosecond laser ranging is used to measure the attitude of the camera.
A new type femtosecond laser tracker is one high precision measurement instrument with urgent need in science research region and industrial manufacture field. This paper focuses on the operational principle and the structure development of the femtosecond laser tracer, and the method of error compensation as well. The system modules were studied and constructed. The femtosecond frequency comb module was firstly analyzed and developed. The femtosecond laser frequency comb performed perfectly high precise distance measurement for laser tracker. The experimental result showed that the stability of repetition rate reached 3.0×10-12@1s and the stability of carrier envelop offset reached 1.0×10-10@1s. The initial experiment showed that measurement error was less than 1ppm. Later the error compensation module was introduced, and the optoelectronic aiming and tracking control module was built. The actual test result showed that the stability of miss distance was better than 2.0 μm, the tracking speed could reach 2m/s.
Spectrally resolved interferometry based on optical frequency comb is an effective way for absolute distance measurement. We introduce wavelet transform to spectrally resolve interferometry as an effective data analysis tool. A comparison has been presented between wavelet transform and conventional algorithm. The results demonstrate that the wavelet transform is a reliable technique and provides good performance over noise resistance for spectrally resolved interferometry measurement.
An experiment of absolute distance measurement by spectrally resolved interferometry has been executed. A Ti:Sapphire femtosecond laser without stable frequency and stable phase was used as an optical source of the measurement system. It greatly simplifies the complexity of the measurement system. A Fabry-Perot Etalon made by ourselves was employed as an optical filter to pick up frequency modes from the broad bandwidth spectrum of femtosecond laser pulse. To achieve the absolute distance, a linear array CCD detector was used to get the interferometric phase information for the calculation of distance. The measurement experiment was carried out in the non-ambiguity range and ranging precision of less than 5 μm was achieved. The result indicates that it’s feasible to measure the absolute distance by spectrally resolved interferometry with a simple femtosecond laser.
The working principle and system design of the laser tracker measurement system are introduced, as well as the key technologies and solutions in the implementation of the system. The design and implementation of the hardware and configuration of the software are mainly researched. The components of the hardware include distance measuring unit, angle measuring unit, tracking and servo control unit and electronic control unit. The distance measuring devices include the relative distance measuring device (IFM) and the absolute distance measuring device (ADM). The main component of the angle measuring device, the precision rotating stage, is mainly comprised of the precision axis and the encoders which are both set in the tracking head. The data processing unit, tracking and control unit and power supply unit are all set in the control box. The software module is comprised of the communication module, calibration and error compensation module, data analysis module, database management module, 3D display module and the man-machine interface module. The prototype of the laser tracker system has been accomplished and experiments have been carried out to verify the proposed strategies of the hardware and software modules. The experiments showed that the IFM distance measuring error is within 0.15mm, the ADM distance measuring error is within 3.5mm and the angle measuring error is within 3〞which demonstrates that the preliminary prototype can realize fundamental measurement tasks.
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