Mr. Roger McKay Profile

Roger McKay

at HP Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 2 June 2003 Paper

Metrology of inkjet MEMS devices

Roger McKay, Susan Redmond, Ron Weller, Kuni Yamamoto, Ganesh Sundaram

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.487601

KEYWORDS: Semiconducting wafers, Metrology, Calibration, Microelectromechanical systems, Standards development, Manufacturing, Silicon, Process control, Optical alignment, Optical lithography

Read Abstract +

Proceedings Article | 16 July 2002 Paper

Low-voltage CD-SEM applications in MEMS devices

Susan Redmond, Roger McKay, Mary Mellard, Catherine Norris, Jerry Wonnacott, Martin Mastovich

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473501

KEYWORDS: Resistors, Scanning electron microscopy, Semiconducting wafers, Oxides, Etching, Aluminum, Metals, Plasma, Microelectromechanical systems, Metrology

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years