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Rob Snel
at TNO
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Publications (3)
Proceedings Article | 10 July 2018 Presentation
Practical co-phasing metrology sensor for E-ELT telescope (Conference Presentation)
Proceedings Volume 10706, 107061I (2018) https://doi.org/10.1117/12.2312469
KEYWORDS: Mirrors, Telescopes, Metrology, Sensors, Optical components, Astronomical telescopes, Actuators, Sensor performance, Calibration, Optical instrument design
Proceedings Article | 26 June 2017 Paper
In-line height profiling metrology sensor for zero defect production control
Rob Snel, Jasper Winters, Thomas Liebig, Wouter Jonker
Proceedings Volume 10329, 1032933 (2017) https://doi.org/10.1117/12.2270711
KEYWORDS: Profiling, Tolerancing, Sensor technology, Time metrology, Control systems, Metrology, Inspection, Error analysis, 3D metrology, Optics manufacturing, Optical inspection, Optical interferometry, Sensors, Image resolution, Mechatronics, Process control, Manufacturing
Proceedings Article | 8 April 2011 Paper
Particle detection on flat surfaces
Jacques van der Donck, Rob Snel, Jetske Stortelder, Alfred Abutan, Sjoerd Oostrom, Sander van Reek, Bert van der Zwan, Peter van der Walle
Proceedings Volume 7969, 79691S (2011) https://doi.org/10.1117/12.879435
KEYWORDS: Particles, Reticles, Extreme ultraviolet, Signal to noise ratio, Semiconducting wafers, Photomasks, Chromium, Signal detection, Scanners, Image processing
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