Dr. Richard D. Jones
Senior Principal Dev Engineer at Broadcom Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 13 June 2023 Presentation + Paper
Paolo Batoni, Jared Stack, Jeff Gardner, Kevin Welch, Richard Jones, John Childers
Proceedings Volume 12540, 1254004 (2023) https://doi.org/10.1117/12.2663405
KEYWORDS: Diffractive optical elements, LIDAR, Silica, Micro optics, Calibration, Diffraction gratings, Optics manufacturing, Diffraction, Optical calibration

Proceedings Article | 16 August 2010 Paper
Proceedings Volume 7789, 778906 (2010) https://doi.org/10.1117/12.859893
KEYWORDS: Etching, Reflectivity, Semiconducting wafers, Photoresist materials, Photoresist processing, Diffractive optical elements, Optical lithography, Silica, Thin film coatings, Binary data

Proceedings Article | 7 March 2008 Paper
Proceedings Volume 6924, 69242O (2008) https://doi.org/10.1117/12.774666
KEYWORDS: Diffractive optical elements, Diffusers, Lithography, Lithographic illumination, Critical dimension metrology, Optics manufacturing, Semiconductors, Photomasks, Custom fabrication, Etching

SPIE Journal Paper | 1 March 2007
OE, Vol. 46, Issue 03, 038001, (March 2007) https://doi.org/10.1117/12.10.1117/1.2716378
KEYWORDS: Polarizers, Diffraction gratings, Silicon, Polarization, Antireflective coatings, Diffraction, Prototyping, Reflection, Optical design, Etching

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