Dr. Richard E. Bills Profile

Dr. Richard E. Bills

EO Systems Engineering

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Author

Publications (5)

Proceedings Article | 13 September 2012 Paper

A next-generation optical surface form inspection instrument for high-volume production applications

Richard Bills, Klaus Freischlad

Proceedings Volume 8494, 84940H (2012) https://doi.org/10.1117/12.928888

KEYWORDS: Inspection, Optical inspection, Surface finishing, Interferometers, Visualization, Lenses, Polishing, Metrology, Monochromatic aberrations, Optical spheres

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Proceedings Article | 21 November 2007 Paper

High accuracy measurements of objects with multiple reflective surfaces with wavelength shifting interferometry

Shouhong Tang, Richard Bills, Klaus Freischlad

Proceedings Volume 6723, 67230F (2007) https://doi.org/10.1117/12.782882

KEYWORDS: Interferometers, Glasses, Extreme ultraviolet lithography, Phase shifts, Reflectivity, Fizeau interferometers, Photomasks, Surface finishing, Phase shifting, Light sources

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Proceedings Article | 14 September 2007 Paper

Weighted least-square approach for simultaneous measurement of multiple reflective surfaces

Shouhong Tang, Richard Bills, Klaus Freischlad

Proceedings Volume 6671, 66710T (2007) https://doi.org/10.1117/12.735151

KEYWORDS: Phase shifts, Reflectivity, Fizeau interferometers, Surface finishing, Interferometers, Phase shifting, Tunable lasers, Reflection, Light sources, Refractive index

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Proceedings Article | 19 May 2003 Paper

High accuracy interferometric measurements of EUVL mask blank substrates

Richard Bills

Proceedings Volume 10314, 1031418 (2003) https://doi.org/10.1117/12.2284033

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SPIE Journal Paper | 1 January 1991

Narrowband lidar technique for sodium temperature and Doppler wind observations of the upper atmosphere

Richard Bills, Chester Gardner, Chiao She

OE, Vol. 30, Issue 01, (January 1991) https://doi.org/10.1117/12.10.1117/12.55765

KEYWORDS: Sodium, LIDAR, Doppler effect, Temperature metrology, Photons, Luminescence, Pulsed laser operation, Absorption, Fourier transforms, Continuous wave operation

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