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Ravikumar Sanapala
Product Marketing Manager at KLA-Tencor Corp
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Publications (2)
Proceedings Article | 16 October 2017 Paper
EUV reticle print verification with advanced broadband optical wafer inspection and e-Beam review systems
Proceedings Volume 10451, 104510L (2017) https://doi.org/10.1117/12.2281632
KEYWORDS: Semiconducting wafers, Photomasks, Inspection, Wafer-level optics, Extreme ultraviolet, Reticles, Optical inspection, Oxides, Wafer inspection, Signal to noise ratio
Proceedings Article | 5 April 2012 Paper
Accelerating litho technology development for advanced design node flash memory FEOL by next-generation wafer inspection and SEM review platforms
Byoung Ho Lee, Jeongho Ahn, Dongchul Ihm, Soobok Chin, Dong-Ryul Lee, Seongchae Choi, Junbum Lee, Ho-Kyu Kang, Gangadharan Sivaraman, Tetsuya Yamamoto, Rahul Lakhawat, Ravikumar Sanapala, Chang Ho Lee, Arun Lobo
Proceedings Volume 8324, 832429 (2012) https://doi.org/10.1117/12.916505
KEYWORDS: Inspection, Scanning electron microscopy, Semiconducting wafers, Bridges, Front end of line, Defect detection, Wafer inspection, Defect inspection, Optical inspection, Particles
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