High order harmonics is generated in a modulated slab waveguide which is filled with helium when a femtosecond laser is focused into this kind of waveguide. The modulated slab waveguide is used to implement quasi-phase matching of high order harmonics so that an obvious increase of the high harmonics yield at wavelengths close to the cutoff region was observed. High order harmonics generated in modulated waveguides with a period of 0.8mm and a period of 0.5mm respectively were compared. The results show that the shorter the period of the modulated slab waveguide is, the higher order high harmonics with phase mismatch we can compensate.
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