Ms. Pauline Voisin Profile

Pauline Voisin

at Commissariat à l'Energie Atomique

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Publications (2)

Proceedings Article | 3 May 2007 Paper

Evaluation of an alternative UV-NIL mold fabrication process

P. Voisin, T. Levender, M. Zelsmann, C. Gourgon, J. Boussey

Proceedings Volume 6533, 65331G (2007) https://doi.org/10.1117/12.736537

KEYWORDS: Silica, Silicon, Etching, Nanoimprint lithography, Ultraviolet radiation, Plasma etching, Electron beam lithography, Optical lithography, Thin films, Scanning electron microscopy

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Proceedings Article | 15 March 2007 Paper

Template flatness issue for UV curing nanoimprint lithography

P. Voisin, A. Jouve, M. Zelsmann, C. Gourgon, J. Boussey

Proceedings Volume 6517, 65172D (2007) https://doi.org/10.1117/12.712032

KEYWORDS: Semiconducting wafers, Polishing, Silica, Scanning electron microscopy, Ultraviolet radiation, Nanoimprint lithography, Etching, Lithography, Photomasks, Microelectronics

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