Mr. Paul A. Bierden Profile

Paul A. Bierden

President & CEO/Co-Founder at Boston Micromachines Corp

SPIE Involvement:

Author

Publications (34)

SPIE Journal Paper | 24 May 2023 Open Access

Open Access

Random vibration testing of microelectromechanical deformable mirrors for space-based high-contrast imaging

Axel Potier, Camilo Mejia Prada, Garreth Ruane, Hong Tang, Wesley Baxter, Duncan Liu, A. J. Eldorado Riggs, Phillip K. Poon, Eduardo Bendek, Nick Siegler, Mary Soria, Mark Hetzel, Charlie Lam, Paul Bierden

JATIS, Vol. 9, Issue 02, 029001, (May 2023) https://doi.org/10.1117/12.10.1117/1.JATIS.9.2.029001

KEYWORDS: Actuators, Microelectromechanical systems, Vibration, Deformation, Coronagraphy, Connectors, Inspection, Exoplanets, Deformable mirrors, Equipment

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Proceedings Article | 29 August 2022 Poster

Poster

Update on the survivability of high-actuator-count MEMS deformable mirror to rocket launch.

Axel Potier, Garreth Ruane, Camilo Mejia Prada, Wesley Baxter, Duncan Liu, Hong Tang, A.J. Eldorado Riggs, Phillip Poon, Eduardo Bendek, Nick Siegler, Mary Soria, Mark Hetzel, Charlie Lam, Paul Bierden

Proceedings Volume 12180, 121805S (2022) https://doi.org/10.1117/12.2629915

KEYWORDS: Microelectromechanical systems, Deformable mirrors, Rockets, Exoplanets, Coronagraphy, Wavefronts, Reliability, Manufacturing, Astrophysics, Astronomy

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Proceedings Article | 1 September 2021 Presentation + Paper

Presentation + Paper

Environmental testing of high-actuator-count MEMS deformable mirrors for space-based applications

Camilo M. Prada, Duncan Liu, Garreth Ruane, Hong Tang, Axel Potier, Paul Bierden, Charlie Lam

Proceedings Volume 11823, 118230M (2021) https://doi.org/10.1117/12.2594263

KEYWORDS: Actuators, Microelectromechanical systems, Deformable mirrors, Oxides, Mirrors, Coronagraphy, Silicon, Etching, Manufacturing, Semiconducting wafers

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Proceedings Article | 26 September 2013 Paper

Paper

Direct imaging of exoplanetary systems with a monolithic multispectral camera

Brian Hicks, Kathleen Oram, Nikole Lewis, Christopher Mendillo, Paul Bierden, TImothy Cook, Supriya Chakrabarti

Proceedings Volume 8864, 886408 (2013) https://doi.org/10.1117/12.2026991

KEYWORDS: Cameras, Exoplanets, Nulling interferometry, Imaging systems, Mirrors, Sensors, Wavefronts, Wavefront sensors, Diffraction, Point spread functions

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Proceedings Article | 5 March 2013 Paper

Paper

Performance analysis of two high actuator count MEMS deformable mirrors

Peter Ryan, Steven Cornelissen, Charlie Lam, Paul Bierden

Proceedings Volume 8617, 861705 (2013) https://doi.org/10.1117/12.2005299

KEYWORDS: Actuators, Microelectromechanical systems, Deformable mirrors, Targeting Task Performance metric, Gemini Planet Imager, Planets, Coronagraphy, Mirrors, Adaptive optics, Exoplanets

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Proceedings Article | 15 February 2012 Paper

Paper

MEMS deformable mirror actuators with enhanced reliability

S. Cornelissen, T. Bifano, P. Bierden

Proceedings Volume 8253, 825306 (2012) https://doi.org/10.1117/12.910742

KEYWORDS: Actuators, Electrodes, Microelectromechanical systems, Reliability, Resistors, Deformable mirrors, Mirrors, Electronics, Image segmentation, Resistance

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Proceedings Article | 28 July 2010 Paper

Paper

MEMS deformable mirrors for astronomical adaptive optics

S. Cornelissen, A. Hartzell, J. Stewart, T. Bifano, P. Bierden

Proceedings Volume 7736, 77362D (2010) https://doi.org/10.1117/12.857296

KEYWORDS: Actuators, Microelectromechanical systems, Deformable mirrors, Wavefronts, Electronics, Adaptive optics, Mirrors, Astronomical adaptive optics, Astronomy, Gemini Planet Imager

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Proceedings Article | 18 February 2010 Paper

Paper

Reliability of MEMS deformable mirror technology used in adaptive optics imaging systems

Allyson Hartzell, Steven Cornelissen, Paul Bierden, Charlie Lam, Daniel Davis

Proceedings Volume 7595, 75950B (2010) https://doi.org/10.1117/12.845610

KEYWORDS: Reliability, Actuators, Microelectromechanical systems, Mirrors, Deformable mirrors, Adaptive optics, Yield improvement, Imaging systems, Code division multiplexing, Manufacturing

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Proceedings Article | 18 February 2010 Paper

Paper

Through-wafer interconnects for high degree of freedom MEMS deformable mirrors

Alioune Diouf, Thomas Bifano, Jason Stewart, Steven Cornelissen, Paul Bierden

Proceedings Volume 7595, 75950N (2010) https://doi.org/10.1117/12.842341

KEYWORDS: Actuators, Gold, Diffractive optical elements, Microelectromechanical systems, Packaging, Silicon, Deformable mirrors, Error analysis, Semiconducting wafers, Silicon carbide

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SPIE Journal Paper | 1 July 2009

4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging

Steven Cornelissen, Paul Bierden, Thomas Bifano, Charlie Lam Lam

JM3, Vol. 8, Issue 03, 031308, (July 2009) https://doi.org/10.1117/12.10.1117/1.3158067

KEYWORDS: Microelectromechanical systems, Actuators, Deformable mirrors, Mirrors, Surface finishing, Ceramics, Electronics, Optical components, Electrodes, Silicon

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Proceedings Article | 23 July 2008 Paper

Paper

Stable flexure mounting of a MEMS deformable mirror for the GPI Planet Imager

Alexis Hill, Darren Erickson, Joeleff Fitzsimmons, Paul Bierden, Steven Cornelissen, Dave Palmer

Proceedings Volume 7018, 70181F (2008) https://doi.org/10.1117/12.789408

KEYWORDS: Microelectromechanical systems, Gemini Planet Imager, Adaptive optics, Humidity, Actuators, Deformable mirrors, Mirrors, Planets, Gemini Observatory, Optical mounts

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Proceedings Article | 12 July 2008 Paper

Paper

Mid-infrared coronagraph for SPICA

K. Enya, L. Abe, K. Haze, S. Tanaka, T. Nakagawa, H. Kataza, S. Higuchi, T. Miyata, S. Sako, T. Nakamura, M. Tamura, J. Nishikawa, N. Murakami, Y. Itoh, T. Wakayama, T. Sato, N. Nakagiri, O. Guyon, M. Venet, P. Bierden

Proceedings Volume 7010, 70102Z (2008) https://doi.org/10.1117/12.788509

KEYWORDS: Coronagraphy, Space telescopes, Infrared telescopes, Cryogenics, Telescopes, Mirrors, Binary data, Infrared radiation, Microelectromechanical systems, James Webb Space Telescope

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The SPace Infrared telescope for Cosmology and Astrophysics (SPICA) is a infrared space-borne telescope mission of the next generation following AKARI. SPICA will carry a telescope with a 3.5 m diameter monolithic primary mirror and the whole telescope will be cooled to 5 K. SPICA is planned to be launched in 2017, into the sun-earth L2 libration halo orbit by an H II-A rocket and execute infrared observations at wavelengths mainly between 5 and 200 micron. The large telescope aperture, the simple pupil shape, the capability of infrared observations from space, and the early launch gives us with the SPICA mission a unique opportunity for coronagraphic observation. We have started development of a coronagraphic instrument for SPICA. The primary target of the SPICA coronagraph is direct observation of extra-solar Jovian planets. The main wavelengths of observation, the required contrast and the inner working angle (IWA) of the SPICA coronagraph are set to be 5-27 micron (3.5-5 micron is optional), 10^-6, and a few λ/D (and as small as possible), respectively, in which λ is the observation wavelength and D is the diameter of the telescope aperture (3.5m). For our laboratory demonstration, we focused first on a coronagraph with a binary shaped pupil mask as the primary candidate for SPICA because of its feasibility. In an experiment with a binary shaped pupil coronagraph with a He-Ne laser (λ=632.8nm), the achieved raw contrast was 6.7×10^-8, derived from the average measured in the dark region without active wavefront control. On the other hand, a study of Phase Induced Amplitude Apodization (PIAA) was initiated in an attempt to achieve better performance, i.e., smaller IWA and higher throughput. A laboratory experiment was performed using a He-Ne laser with active wavefront control, and a raw contrast of 6.5×10^-7 was achieved. We also present recent progress made in the cryogenic active optics for SPICA. Prototypes of cryogenic deformable by Micro Electro Mechanical Systems (MEMS) techniques were developed and a first demonstration of the deformation of their surfaces was performed with liquid nitrogen cooling. Experiments with piezo-actuators for a cryogenic tip-tilt mirror are also ongoing.

Proceedings Article | 30 April 2008 Paper

Paper

MEMS deformable mirrors for space and defense applications

T. Bifano, Paul Bierden, Steven Cornelissen

Proceedings Volume 6959, 695914 (2008) https://doi.org/10.1117/12.781676

KEYWORDS: Actuators, Mirrors, Microelectromechanical systems, Deformable mirrors, Wavefronts, Defense and security, Silicon, Control systems, Imaging systems, Chemical elements

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Proceedings Article | 8 February 2008 Paper

Paper

Fabrication of single crystalline MEMS DM using anodic wafer bonding

Alioune Diouf, Mike Gingras, Jason Stewart, Thomas Bifano, Steven Cornelissen, Paul Bierden

Proceedings Volume 6888, 68880U (2008) https://doi.org/10.1117/12.763124

KEYWORDS: Semiconducting wafers, Actuators, Wafer bonding, Mirrors, Microelectromechanical systems, Glasses, Silicon, Etching, Electrodes, Sputter deposition

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Proceedings Article | 8 February 2008 Paper

Paper

A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging

S. Cornelissen, P. Bierden, T. Bifano

Proceedings Volume 6888, 68880V (2008) https://doi.org/10.1117/12.770620

KEYWORDS: Actuators, Microelectromechanical systems, Mirrors, Deformable mirrors, Surface finishing, Ceramics, Electrodes, Silicon, Silicon films, Electronics

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Proceedings Article | 12 September 2007 Paper

Paper

Advances in MEMS deformable mirror technology for laser beam shaping

Steven Menn, Steven Cornelissen, Paul Bierden

Proceedings Volume 6663, 66630M (2007) https://doi.org/10.1117/12.739042

KEYWORDS: Actuators, Deformable mirrors, Microelectromechanical systems, Adaptive optics, Mirrors, Electrodes, Laser communications, Wavefronts, Beam shaping, Electronics

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Proceedings Article | 8 June 2006 Paper

Paper

Correction of large amplitude wavefront aberrations

S. Cornelissen, P. Bierden, T. Bifano, R. Webb, S. Burns, S. Pappas

Proceedings Volume 6018, 601811 (2006) https://doi.org/10.1117/12.669370

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Proceedings Article | 23 January 2006 Paper

Paper

Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror

Julia Evans, Katie Morzinski, Scott Severson, Lisa Poyneer, Bruce Macintosh, Daren Dillon, Layra Reza, Donald Gavel, David Palmer, Scot Olivier, Paul Bierden

Proceedings Volume 6113, 61130I (2006) https://doi.org/10.1117/12.648977

KEYWORDS: Actuators, Microelectromechanical systems, Wavefronts, Adaptive optics, Deformable mirrors, Spatial frequencies, Electronics, Optical testing, Interferometers, Diffraction

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Proceedings Article | 23 January 2006 Paper

Paper

Design and development of a 329-segment tip-tilt piston mirror array for space-based adaptive optics

Jason Stewart, Thomas Bifano, Paul Bierden, Steven Cornelissen, Timothy Cook, B. Martin Levine

Proceedings Volume 6113, 61130O (2006) https://doi.org/10.1117/12.651373

KEYWORDS: Mirrors, Actuators, Coronagraphy, Electromechanical design, Polishing, Microelectromechanical systems, Surface roughness, Planets, Silicon, Oxides

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Proceedings Article | 25 October 2004 Paper

Paper

Megapixel wavefront correctors

Thomas Bifano, Paul Bierden, Hao Zhu, Steven Cornelissen, Jin Hong Kim

Proceedings Volume 5490, (2004) https://doi.org/10.1117/12.549393

KEYWORDS: Actuators, Silicon, Spatial light modulators, Mirrors, Electrodes, Wavefronts, Optics manufacturing, Reflectivity, Aluminum, Electronics

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Proceedings Article | 12 October 2004 Paper

Paper

Micromachined deformable mirrors for dynamic wavefront control

Thomas Bifano, Paul Bierden, Julie Perreault

Proceedings Volume 5553, (2004) https://doi.org/10.1117/12.556690

KEYWORDS: Mirrors, Actuators, Wavefronts, Silicon, Deformable mirrors, Gold, Reflectivity, Etching, Adaptive optics, Coating

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Proceedings Article | 12 October 2004 Paper

Paper

Design and fabrication of reflective spatial light modulator for high-dynamic-range wavefront control

Hao Zhu, Paul Bierden, Steven Cornelissen, Thomas Bifano, Jin-Hong Kim

Proceedings Volume 5553, (2004) https://doi.org/10.1117/12.559929

KEYWORDS: Electronics, Actuators, Metals, Mirrors, Electrodes, Photoresist materials, Etching, Aluminum, Spatial light modulators, Microelectromechanical systems

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Proceedings Article | 20 January 2003 Paper

Paper

MEMS spatial light modulators with integrated electronics

Thomas Becker, Thomas Bifano, Hocheol Lee, Michele Miller, Paul Bierden, Steven Cornelissen

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.477931

KEYWORDS: Actuators, Mirrors, Metals, Electronics, Microelectromechanical systems, Aluminum, Electrodes, Photoresist materials, Etching, Control systems

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Proceedings Article | 20 January 2003 Paper

Paper

Large-scale polysilicon surface-micromachined spatial light modulator

Clara Dimas, Julie Perreault, Steven Cornelissen, Harold Dyson, Peter Krulevitch, Paul Bierden, Thomas Bifano

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.477932

KEYWORDS: Actuators, Spatial light modulators, Mirrors, Microelectromechanical systems, Micromirrors, Reflectivity, Interferometers, Packaging, Atmospheric optics, Spatial resolution

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Proceedings Article | 20 January 2003 Paper

Paper

MOEMS spatial light modulator development at the Center for Adaptive Optics

Peter A. Krulevitch, Paul Bierden, Thomas Bifano, Emily Carr, Clara Dimas, Harold Dyson, Michael Helmbrecht, Peter Kurczynski, Richard Muller, Scot Olivier, Yves-Alain Peter, Bernard Sadoulet, Olav Solgaard, Eui-Hyeok Yang

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.478562

KEYWORDS: Adaptive optics, Actuators, Microelectromechanical systems, Mirrors, Deformable mirrors, Electronics, Astronomy, Microopto electromechanical systems, Electrodes, Telescopes

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Proceedings Article | 6 November 2002 Paper

Paper

Micromachined deformable mirrors for adaptive optics

Thomas Bifano, Julie Perreault, Paul Bierden, Clara Dimas

Proceedings Volume 4825, (2002) https://doi.org/10.1117/12.457847

KEYWORDS: Mirrors, Actuators, Deformable mirrors, Adaptive optics, Silicon films, Chemical vapor deposition, Laser communications, Silicon, Thin films, Retinal scanning

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Proceedings Article | 19 April 2002 Paper

Paper

Polysilicon surface-micromachined spatial light modulator with novel electronic integration

Clara Dimas, Thomas Bifano, Paul Bierden, Julie Perreault, Peter A. Krulevitch, Ryan Roehnelt, Steven Cornelissen

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462846

KEYWORDS: Spatial light modulators, Mirrors, Actuators, Electrodes, Microelectromechanical systems, Etching, Deep reactive ion etching, Analog electronics, Semiconducting wafers, Thin films

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Proceedings Article | 19 April 2002 Paper

Paper

Large-scale metal MEMS mirror arrays with integrated electronics

Thomas Bifano, Paul Bierden, Steven Cornelissen, Clara Dimas, Hocheol Lee, Michele Miller, Julie Perreault

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462845

KEYWORDS: Actuators, Microelectromechanical systems, Mirrors, Metals, Electronics, Electrodes, Aluminum, Optics manufacturing, Spatial light modulators, Surface finishing

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Proceedings Article | 1 February 2002 Paper

Paper

Manufacturing of an optical-quality mirror system for adaptive optics

Julie Perreault, Paul Bierden, Mark Horenstein, Thomas Bifano

Proceedings Volume 4493, (2002) https://doi.org/10.1117/12.454703

KEYWORDS: Mirrors, Gold, Adaptive optics, Optics manufacturing, Actuators, Reflectivity, Silicon, Surface finishing, Surface roughness, Coating

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Proceedings Article | 1 February 2002 Paper

Paper

Compact adaptive optical compensation systems using continuous silicon deformable mirrors

Greg Reimann, Julie Perreault, Paul Bierden, Thomas Bifano

Proceedings Volume 4493, (2002) https://doi.org/10.1117/12.454725

KEYWORDS: Microelectromechanical systems, Adaptive optics, Mirrors, Silicon, Optics manufacturing, Actuators, Optical testing, Deformable mirrors, Imaging systems, Stochastic processes

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Proceedings Article | 1 February 2002 Paper

Paper

Micro-electromechanical spatial light modulators with integrated electronics

Steven Cornelissen, Thomas Bifano, Paul Bierden

Proceedings Volume 4493, (2002) https://doi.org/10.1117/12.454712

KEYWORDS: Actuators, Mirrors, Metals, Electronics, Microelectromechanical systems, Aluminum, Sputter deposition, Electromechanical design, Spatial light modulators, Electrodes

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Proceedings Article | 2 October 2001 Paper

Paper

MEMS spatial light modulators with integrated electronics

Steven Cornelissen, Thomas Bifano, Paul Bierden

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443099

KEYWORDS: Actuators, Metals, Mirrors, Microelectromechanical systems, Electronics, Etching, Electrodes, Photoresist materials, Spatial light modulators, Sputter deposition

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Proceedings Article | 22 November 2000 Paper

Paper

Micro-electro-mechanical systems spatial light modulator development

Scot Olivier, Paul Bierden, Thomas Bifano, David Bishop, Emily Carr, William Cowan, Matthew Hart, Michael Helmbrecht, Peter A. Krulevitch, Richard Muller, Bernard Sadoulet, Olav Solgaard, J. Yu

Proceedings Volume 4124, (2000) https://doi.org/10.1117/12.407513

KEYWORDS: Mirrors, Microelectromechanical systems, Actuators, Spatial light modulators, Adaptive optics, Electronics, Gold, Control systems, Analytical research, Wavefronts

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Proceedings Article | 22 November 2000 Paper

Paper

Micromachined deformable mirror for optical wavefront compensation

Thomas Bifano, Julie Perreault, Paul Bierden

Proceedings Volume 4124, (2000) https://doi.org/10.1117/12.407508

KEYWORDS: Actuators, Mirrors, Deformable mirrors, Adaptive optics, Silicon films, Silicon, Electrodes, Wavefronts, Ions, Polysomnography

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Showing 5 of 34 publications

Conference Committee Involvement (4)

Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII

3 February 2014 | San Francisco, California, United States

Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII

4 February 2013 | San Francisco, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI

23 January 2012 | San Francisco, California, United States

Adaptive X-Ray Optics

3 August 2010 | San Diego, California, United States

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