In the field of laser ablation, especially in the field of micro-structuring, the current challenge is the improvement of productivity. While many applications, e.g. surface fictionalization and structuring, drilling and thin film ablation, use relatively low pulse energies, industrial laser sources provide considerably higher average powers and pulse energies. The main challenge consist of the effective energy distribution and depositions. There are essential two complementary approaches for the up-scaling of (ultra) short pulse laser processes: Higher repetition frequency or higher pulse energies. Using lasers with high repetition rates in the MHz region can cause thermal issues like overheating, melt production and low ablation quality. In this paper we pursuit the second approach by using diffractive optics for parallel processing. We will discuss, which technologies can be used and which applications will benefit from the multi-beam approach and which increase in productivity can be expected. Additionally we will show, which quality attributes can be used to rate the performance of a diffractive optic and and which limitations and restrictions this technology has.
The class of ultra-short-pulse (USP) laser sources are used, whenever high precession and high quality material processing is demanded. These laser sources deliver pulse duration in the range of ps to fs and are characterized with high peak intensities leading to a direct vaporization of the material with a minimum thermal damage. With the availability of industrial laser source with an average power of up to 1000W, the main challenge consist of the effective energy distribution and disposition. Using lasers with high repetition rates in the MHz region can cause thermal issues like overheating, melt production and low ablation quality.
In this paper, we will discuss different approaches for multibeam processing for utilization of high pulse energies. The combination of diffractive optics and conventional galvometer scanner can be used for high throughput laser ablation, but are limited in the optical qualities. We will show which applications can benefit from this hybrid optic and which improvements in productivity are expected. In addition, the optical limitations of the system will be compiled, in order to evaluate the suitability of this approach for any given application.
Conference Committee Involvement (6)
Laser Beam Shaping XXIII
21 August 2023 | San Diego, California, United States
Laser Beam Shaping XXII
23 August 2022 | San Diego, California, United States
Laser Beam Shaping XXI
1 August 2021 | San Diego, California, United States
Laser Beam Shaping XX
24 August 2020 | Online Only, California, United States
Laser Beam Shaping XIX
11 August 2019 | San Diego, California, United States
Laser Beam Shaping XVIII
20 August 2018 | San Diego, California, United States
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