Dr. Nicolas Posseme Profile

Dr. Nicolas Posseme

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Publications (2)

Proceedings Article | 10 April 2024 Presentation

Understanding plasma etching of grayscale microlenses and multi-height structures for optoelectronic devices

Assia Selmouni, Aurélien Tavernier, Api Warsono, Sébastien Bérard-Bergery, Nicolas Posseme

Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3010137

KEYWORDS: Plasma etching, Microlens, Optoelectronic devices, Plasma, Etching, Passivation, Deformation, X-ray photoelectron spectroscopy, Vacuum chambers, Surface roughness

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Proceedings Article | 9 April 2024 Poster + Paper

Fabrication of 3D microstructures by controlled bending of suspended microdisks

R. Feougier, A. Aliane, A. Sarrazin, Z. Mehrez, N. Posseme, R. Tiron

Proceedings Volume 12956, 129560K (2024) https://doi.org/10.1117/12.3009898

KEYWORDS: Fabrication, 3D microstructuring, Silicon, Deformation, Bending stress, Tin, Microlens, Titanium, Atomic force microscopy

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