Mr. Nicolas Clément Profile

Nicolas Clément

at POLLEN Metrology

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Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper

Parametric modeling of patterned object with variations and expert tuning of edge placement

B. Darbon, M. Grould, N. Clément, J. Baderot, S. Martinez, J. Foucher

Proceedings Volume 11615, 116150K (2021) https://doi.org/10.1117/12.2583810

KEYWORDS: Machine learning, Semiconductors, Microscopes, Metrology, Process engineering, Manufacturing, Image processing, Databases, Algorithm development, Transmission electron microscopy

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Proceedings Article | 23 March 2020 Paper

Machine Learning assistant technology to facilitate Fin and 3D memory measurements on SEM and TEM images

J. Baderot, B. Darbon, N. Clement, M. Bryan, S. Martinez, J. Foucher

Proceedings Volume 11329, 113290X (2020) https://doi.org/10.1117/12.2552033

KEYWORDS: 3D metrology, Machine learning, Scanning electron microscopy, 3D image processing, Process engineering, Transmission electron microscopy, Image processing, 3D modeling, Semiconductors, Computer simulations

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