Mr. Narendra Chaudhary Profile

Narendra Chaudhary

AI Applied Research Scientist

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Publications (8)

Proceedings Article | 26 September 2019 Paper

Mask modeling using a deep learning approach

Alex Zepka, Sabrina Aliyeva, Parikshit Kulkarni, Narendra Chaudhary

Proceedings Volume 11148, 111480A (2019) https://doi.org/10.1117/12.2536545

KEYWORDS: Data modeling, Scanning electron microscopy, Photomasks, Metrology, Calibration, Process modeling, Statistical modeling, Lithography, Neural networks, Etching

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Proceedings Article | 29 August 2019 Paper

Towards a visualization of deep neural networks for rough line images

Narendra Chaudhary, Serap Savari

Proceedings Volume 11177, 111770S (2019) https://doi.org/10.1117/12.2535667

KEYWORDS: Visualization, Scanning electron microscopy, Image filtering, Denoising, Image processing, Neural networks, Edge detection, Line edge roughness, Line width roughness, Machine learning

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SPIE Journal Paper | 29 April 2019

Line roughness estimation and Poisson denoising in scanning electron microscope images using deep learning

Narendra Chaudhary, Serap Savari, Sai Yeddulapalli

JM3, Vol. 18, Issue 02, 024001, (April 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.2.024001

KEYWORDS: Scanning electron microscopy, Neural networks, Line width roughness, Denoising, Line edge roughness, Machine learning, Monte Carlo methods, Computer simulations, Convolutional neural networks, Wavelets

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Proceedings Article | 3 October 2018 Paper

Automated rough line-edge estimation from SEM images using deep convolutional neural networks

Narendra Chaudhary, Serap Savari, S. S. Yeddulapalli

Proceedings Volume 10810, 108101L (2018) https://doi.org/10.1117/12.2501723

KEYWORDS: Scanning electron microscopy, Convolutional neural networks, Line edge roughness, Machine learning, Line width roughness, Image processing, Neural networks, Stochastic processes

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Proceedings Article | 19 September 2018 Paper

Deep supervised learning to estimate true rough line images from SEM images

Narendra Chaudhary, Serap Savari, S. S. Yeddulapalli

Proceedings Volume 10775, 107750R (2018) https://doi.org/10.1117/12.2324341

KEYWORDS: Neural networks, Scanning electron microscopy, Line width roughness, Machine learning, Denoising, Line edge roughness, Stochastic processes, Convolutional neural networks

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SPIE Journal Paper | 7 November 2017 Open Access

Parallel compression/decompression-based datapath architecture for multibeam mask writers

Narendra Chaudhary, Serap Savari

JM3, Vol. 16, Issue 04, 043503, (November 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.4.043503

KEYWORDS: Photomasks, Clocks, Data communications, Logic, Data compression, Telecommunications, Digital electronics, Image compression, Computer architecture, Video compression

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Proceedings Article | 28 September 2017 Paper

Parallel compression/decompression-based datapath architecture for multibeam mask writers

Narendra Chaudhary, Serap Savari

Proceedings Volume 10446, 104460C (2017) https://doi.org/10.1117/12.2279737

KEYWORDS: Photomasks, Electron beam lithography, Lithography, Mask making, Data compression, Electron beams, Beam controllers

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Proceedings Article | 20 October 2016 Paper

A parallel multibeam mask writing method and its impact on data volumes

N. Chaudhary, Y. Luo, S. Savari

Proceedings Volume 10032, 1003206 (2016) https://doi.org/10.1117/12.2248449

KEYWORDS: Data compression, Photomasks, Image compression, Computer programming, Video, Nanofabrication, Data modeling, Image processing, Data processing, Spatial filters

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Showing 5 of 8 publications

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