We report on advances in the fabrication of Josephson junctions, crucial devices in superconducting quantum circuits. In our previous work, we successfully fabricated these on 12-inch substrates using ArF immersion lithography. To enable future large-scale production, we are moving towards sputtering and dry etching techniques. After initial successful tests on a 4-inch substrate, we have now verified this process on 12-inch substrate fabrication equipment, marking significant progress despite the challenges we have faced.
In recent years, the number of qubits in superconducting quantum computers has increased. It is anticipated that future attempts to realize fault-tolerant superconducting quantum computers will require an ability to fabricate large numbers of superconducting qubits uniformly on large-area substrates. Specifically, it is expected that technology will be developed to fabricate a large number of Josephson junctions on a 12-inch substrate in a short period with minimum dimensional variations in the superconducting quantum circuits. In this manuscript, we report on a technology that enables the uniform formation of resist patterns for Josephson junctions in large quantities on 12-inch substrates by replacing electron beam lithography with ArF immersion lithography.
Early detection of cancer through medical imaging has a critical impact on patient survival rates. There are many efforts for detecting early cancer in situ using modalities other than traditional medical optical imaging, which contain additional information over conventional micrographs of surface morphology acquired without staining. We analyzed the Mueller matrix components of human colon tissue obtained with an imaging polarimeter microscope at an illumination wavelength of 442 nm by principal components analysis in order to separate the traditional non-polarized gray image and to investigate the structure of the parameter space of polarization transformation by tissue. We also analyzed Mueller matrix by mapping it to a coherent matrix and performed eigenvalue analysis. The 1st to 4th principal components contain 99% of the information present in the images; polarization information contributes less than 10% of the information in the Mueller matrix. In one individual, 80% of the cancer was detected, without the first components which contains traditional non-polarized gray image for traditional diagnosis. Microscopic fine structures were observed, particularly in the 3rd and 4th principal components’ score images. The entropy image of corrugated cancer tissue was smoother than that of the traditional gray image. There were several abnormal regions identified in adjacent regions of cancer, whose residues exceeded the noise level of the instrument used.
Mueller polarimetric imaging in dark-field observation shows a contrast enhancement between healthy and cancerous human colon tissue in some reports. We have developed a Mueller-matrix microscope system that combines a dark-field polarization illuminator with an imaging polarimeter to measure the polarization characteristics of scattered light from human colon tissue samples. A multichannel light source permits the acquisition of multispectral Mueller matrices of the sample. The wavelength and polarization state selections are automated, as is the Mueller matrix measurement. The imaging polarimeter permits the system to perform fast, stable measurements. Calibration allows us to reduce the error associated with the illumination and imaging optics in the microscope system. Our system indicates a clear difference between the average Mueller matrix measurements of healthy and cancerous human colon tissue, which agrees well with previously reported results.
Without moving parts, the snapshot imaging polarimeter utilizing Savart plates is capable of stable and fast measurements of spatiallly distributed Stokes parameters. To increase feasibility of the optical design, we propose modi cations that enable a wider eld-of view. By changing the Savar plates' con guration and improving the calibration procedure, the unwanted effects associated with the increase in the eld of view can be reduced. We carried out the veri cation experiments of the wide eld of view snapshot imaging polarimeter.
An interferometric method for measuring the two-dimensional distribution of the state of polarization (SOP) of light is presented. A pair of Savart plates, a half-wave plate, and an analyzer are inserted between the lenses of a double-diffraction imaging system, so that multiple interference fringes are generated over the video camera. The Fourier analysis of the image obtained from the video camera allows us to determine the two-dimensional distributions of the four Stokes parameters over the object plane. No mechanical or active components for polarization control are required and two dimensional distributions of any parameters related to SOP can be determined from the single image. Principle of this method is experimentally demonstrated by measuring the SOP distribution of the light transmitted by a liquid crystal cell.
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