Dr. Muneyuki Fukuda Profile

Dr. Muneyuki Fukuda

at Hitachi Ltd

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Publications (1)

Proceedings Article | 20 April 2011 Paper

A method for improving resolution of a scanning electron microscope for inspection of nanodevices

Muneyuki Fukuda, Noritsugu Takahashi, Tomoyasu Shojo, Hiroya Ohta, Hiroshi Suzuki

Proceedings Volume 7971, 797110 (2011) https://doi.org/10.1117/12.879042

KEYWORDS: Scanning electron microscopy, Electron beams, Magnetism, Monochromatic aberrations, Inspection, Objectives, Chromatic aberrations, Optical aberrations, Electron microscopes, Nanostructures

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