Mr. Muhammad Safdar Profile

Muhammad Safdar

at imec

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Publications (2)

Proceedings Article | 1 December 2022 Poster + Paper

Scaling and readiness of underlayers for high-NA EUV lithography

Roberto Fallica, Danilo De Simone, Steven Chen, Muhammad Safdar, Hyo Seon Suh

Proceedings Volume 12292, 122920V (2022) https://doi.org/10.1117/12.2645864

KEYWORDS: Extreme ultraviolet lithography, Photoresist materials, Extreme ultraviolet, Lithography, Photoresist developing

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SPIE Journal Paper | 15 November 2022

Scaling and readiness of underlayers for high-numerical aperture extreme ultraviolet lithography

Roberto Fallica, Danilo De Simone, Steven Chen, Muhammad Safdar, Hyo Seon Suh

JM3, Vol. 21, Issue 04, 044601, (November 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.044601

KEYWORDS: Extreme ultraviolet lithography, Photoresist materials, Surface roughness, Line width roughness, Semiconducting wafers, Optical lithography, Extreme ultraviolet, Lithography, Coating, Thin films

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