Dr. Moorthi Palaniapan Profile

Dr. Moorthi Palaniapan

at National Univ of Singapore

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Publications (3)

Proceedings Article | 9 February 2009 Paper

An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators

C.-L. Wong, M. Palaniapan

Proceedings Volume 7206, 72060D (2009) https://doi.org/10.1117/12.809995

KEYWORDS: Resonators, Phonons, Transducers, Sensors, Temperature metrology, Protactinium, Acoustics, Reliability, Microelectromechanical systems, Scanning electron microscopy

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Proceedings Article | 30 December 2008 Paper

Characterization techniques for NEMS/MEMS devices

Chee-Leong Wong, Moorthi Palaniapan

Proceedings Volume 7268, 72681F (2008) https://doi.org/10.1117/12.810798

KEYWORDS: Resonators, Scanning electron microscopy, Phonons, Acoustics, Network security, Microelectromechanical systems, Measurement devices, Imaging systems, Transducers, Motion measurement

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Proceedings Article | 21 December 2007 Paper

Nonlinear behavior modeling of SOI micromechanical free-free beam resonators

Lichun Shao, Moorthi Palaniapan

Proceedings Volume 6798, 67980O (2007) https://doi.org/10.1117/12.759624

KEYWORDS: Resonators, Microresonators, Silicon, Finite element methods, Metals, MATLAB, Microelectromechanical systems, Electrodes, Optical simulations, Beam shaping

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