X-ray technology provides a number of powerful tools used in many different areas of science and industry. The ability to focus x-rays is the key to a wide range of applications including medicine (diagnosis and therapy), industrial applications (lithography and inspection), astronomy (space telescopes) and x-ray imaging (microscopy and analysis). This work presents the design and microfabrication of a novel x-ray micro optical system for use in an x-ray microprobe for analysis of biological cells. A reflective micro-optical system capable of focusing a wide range of wavelengths is at an advanced stage of development. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and sensor calibration.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.