Dr. Mitsuhiro H. Hata
Senior Engineer at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 29 March 2006 Paper
Mitsuhiro Hata, Jin-Young Yoon, Jung-Hwan Hah, Man-Hyoung Ryoo, Sang-Jun Choi, Han-Ku Cho
Proceedings Volume 6153, 61531Y (2006) https://doi.org/10.1117/12.655955
KEYWORDS: Photoresist materials, Thin film coatings, Extreme ultraviolet lithography, Polymers, Coating, Photoresist developing, Semiconducting wafers, Extreme ultraviolet, Lithography, Scanning electron microscopy

Proceedings Article | 4 May 2005 Paper
Jung Hwan Hah, Subramanya Mayya, Mitsuhiro Hata, Hyun-Woo Kim, Man-Hyoung Ryoo, Sang-Gyun Woo, Han-Ku Cho, Joo-Tae Moon, Byung-Il Ryu
Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.599450
KEYWORDS: Optical lithography, Lithography, Photoresist processing, Chemical reactions, Resolution enhancement technologies, Hydrogen, Scanning electron microscopy, Polymers, Interfaces, Semiconductor manufacturing

Proceedings Article | 4 May 2005 Paper
Mitsuhiro Hata, Jung-Hwan Hah, Hyun-Woo Kim, Man-Hyoung Ryoo, Sang-Gyun Woo, Han-Ku Cho
Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.599468
KEYWORDS: Polymers, Photoresist materials, Semiconducting wafers, Optical lithography, Chemical reactions, Magnesium, Critical dimension metrology, Resolution enhancement technologies, Industrial chemicals, Scanning electron microscopy

Proceedings Article | 14 May 2004 Paper
Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.534811
KEYWORDS: Critical dimension metrology, Photomasks, Photoresist materials, Lithography, Cadmium, Optical lithography, Image processing, Resolution enhancement technologies, Semiconducting wafers, Temperature metrology

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