Dr. Mirwais Aktary Profile

Dr. Mirwais Aktary

CEO at Applied NanoTools Inc

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Author

Publications (4)

Proceedings Article | 3 October 2023 Presentation + Paper

Fabrication and characterization of diffractive optics for EUV applications

Remko van den Hurk, Rob Peters, Mirwais Aktary

Proceedings Volume 12694, 126940C (2023) https://doi.org/10.1117/12.2677780

KEYWORDS: Zone plates, Ruthenium, Chromium, Scanning transmission electron microscopy, Etching, Silicon nitride, Fabrication, Silicon carbide, EUV optics, Extreme ultraviolet

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Proceedings Article | 17 March 2023 Presentation + Paper

Prototyping of silicon nitride photonic integrated circuits for visible and near-infrared applications

Cameron Horvath, Jocelyn Westwood-Bachman, Kevin Setzer, Alexandria McKinlay, Cameron Naraine, Hamidu Mbonde, Bruno Segat Frare, Pooya Torab Ahmadi, Peter Mascher, Jonathan D. Bradley, Mirwais Aktary

Proceedings Volume 12424, 1242404 (2023) https://doi.org/10.1117/12.2647576

KEYWORDS: Silicon nitride, Photonic integrated circuits, Fabrication, Prototyping, Electron beam lithography, Silicon, Waveguides

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Proceedings Article | 9 September 2019 Presentation

Single exposure for double-sided zone plate optics for soft and hard x-ray imaging (Conference Presentation)

Robert Peters, Christian Fella, Dominik Müller, Mansi Shukla, Remko van den Hurk, Mirwais Aktary

Proceedings Volume 11112, 111120P (2019) https://doi.org/10.1117/12.2530590

KEYWORDS: Zone plates, X-ray optics, Electron beam lithography, Hard x-rays, X-ray imaging, Lithography, X-ray diffraction, X-rays, Optical alignment, Metals

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Proceedings Article | 19 September 2017 Presentation

A new cryo scanning transmission x-ray microscope at the Canadian Light Source (Conference Presentation)

Jan Geilhufe, Adam F. Leontowich, Russ Berg, Chris Regier, Darwin Taylor, Jian Wang, John Swirsky, Chithra Karunakaran, Robert Peters, Mirwais Aktary, Adam Hitchcock, Stephen Urquhart

Proceedings Volume 10389, 103890P (2017) https://doi.org/10.1117/12.2275779

KEYWORDS: X-rays, Microscopes, Light sources, X-ray imaging, Tomography, Absorption spectroscopy, Liquids, Cryogenics, Temperature metrology, Nanoprobes

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