Ms. Min K. Yang Profile

Min K. Yang

at Dupont CR&D

SPIE Involvement:

Author

Publications (7)

SPIE Journal Paper | 1 April 2009

Index of refraction of high-index lithographic immersion fluids and its variability

Min Yang, Simon Kaplan, Roger French, John Burnett

JM3, Vol. 8, Issue 02, 023005, (April 2009) https://doi.org/10.1117/12.10.1117/1.3124189

KEYWORDS: Refraction, Water, Refractive index, Prisms, Thermal optics, Lithography, Microfluidics, Absorbance, Temperature metrology, Immersion lithography

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SPIE Journal Paper | 1 July 2008

Optical properties of Teflon^® AF amorphous fluoropolymers

Min Yang, Roger French, Edward Tokarsky

JM3, Vol. 7, Issue 03, 033010, (July 2008) https://doi.org/10.1117/12.10.1117/1.2965541

KEYWORDS: Atrial fibrillation, Absorption, Absorbance, Optical properties, Refractive index, Refraction, Polymers, Silicon, Data modeling, Silicon films

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Proceedings Article | 26 March 2007 Paper

High-index immersion lithography with second-generation immersion fluids to enable numerical aperatures of 1.55 for cost effective 32-nm half pitches

R. French, V. Liberman, H. Tran, J. Feldman, D. Adelman, R. Wheland, W. Qiu, S. McLain, O. Nagao, M. Kaku, M. Mocella, M. Yang, M. Lemon, L. Brubaker, A. Shoe, B. Fones, B. Fischel, K. Krohn, D. Hardy, C. Chen

Proceedings Volume 6520, 65201O (2007) https://doi.org/10.1117/12.712234

KEYWORDS: Water, Absorbance, Microfluidics, Refractive index, Immersion lithography, Diffractive optical elements, Contamination, Scanners, Computational fluid dynamics, Absorption

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Proceedings Article | 15 March 2006 Paper

Second generation fluids for 193nm immersion lithography

Roger French, Weiming Qiu, Min Yang, Robert Wheland, Michael Lemon, Aaron Shoe, Doug Adelman, Michael Crawford, Hoang Tran, Jerald Feldman, Steve McLain, Sheng Peng

Proceedings Volume 6154, 615415 (2006) https://doi.org/10.1117/12.656626

KEYWORDS: Microfluidics, Refractive index, Immersion lithography, Microfluidic imaging, Water, Absorbance, Transparency, Lithography, 193nm lithography, Optical lithography

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SPIE Journal Paper | 1 July 2005

Imaging of 32-nm 1:1 lines and spaces using 193-nm immersion interference lithography with second-generation immersion fluids to achieve a numerical aperture of 1.5 and a k₁ of 0.25

Roger French, Harry Sewell, Min Yang, Sheng Peng, Diane McCafferty, Weiming Qiu, Robert Wheland, Michael Lemon, Louis Markoya, Michael Crawford

JM3, Vol. 4, Issue 03, 031103, (July 2005) https://doi.org/10.1117/12.10.1117/1.2039953

KEYWORDS: Refractive index, Water, Oscillators, Absorption, Absorbance, Lithography, Immersion lithography, Microfluidics, Microfluidic imaging, Glasses

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Proceedings Article | 12 May 2005 Paper

Second generation fluids for 193 nm immersion lithography

Sheng Peng, Roger French, Weiming Qiu, Robert Wheland, Min Yang, Michael Lemon, Michael Crawford

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.606448

KEYWORDS: Water, Oscillators, Refraction, Absorption, Absorbance, Microfluidics, Immersion lithography, Optical lithography, Lithography, Microfluidic imaging

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Proceedings Article | 28 May 2004 Paper

Immersion fluid refractive indices using prism minimum deviation techniques

Roger French, Min Yang, Michael Lemon, Ron Synowicki, Greg Pribil, Gerald Cooney, Craig Herzinger, Steven Green, John Burnett, Simon Kaplan

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.537727

KEYWORDS: Prisms, Refractive index, Liquids, Vacuum ultraviolet, Water, Thermal optics, Refraction, Immersion lithography, Nitrogen, Environmental sensing

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Showing 5 of 7 publications

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