In this work we have designed, fabricated, and tested a photonic crystal slab (PCS) with a line defect waveguide for the
detection and identification of pathogenic DNA. A PCS is constructed by fabricating a material with 2-dimensional
dielectric periodicity sandwiched between two semi-infinite cladding regions of lower effective index [1]. In order to
uniquely identify pathogens critical to medical and homeland defense applications, the PCS was functionalized with a
single stranded probe molecule providing highly specific binding for the target DNA. Integrated microfluidic channels
provide delivery of the pathogen DNA resulting in hybridization and binding in the PCS holes. The binding event
changes the refractive index of the PCS which results in a measurable change in the transmitted power. We will discuss
design parameters and the suite of modeling tools used to optimize the PCS, defect waveguide, and coupling devices.
An overview of the fabrication methods and tools will be provided and we will also report preliminary experimental
results.
The development of a miniature angular rate sensor based on silicon-on-insulator (SOI) microfabrication technology is presented. The design, fabrication, integration, and inertial testing of a MEMS-based angular rate sensor with large dynamic range were the driving forces behind this research. The design goals of 10-deg/h bias stability while operating through 2000-deg/s roll environments are presented. The sensor design is based on a straightforward single-mask fabrication approach that utilizes deep reactive ion etching of a 100-µm-thick device layer, with a buried 2- to 3-µm oxide layer used as the sacrificial layer, in an SOI substrate. To date, the data show demonstrated bias drift performance of 60 deg/h over this fast-roll environment.
This invited communication presents the microfabrication technologies, and associated issues, being developed by the U.S. Army’s AMRDEC for missile components. Primary components are inertial sensors and radio frequency switches. Two inertial sensor types are discussed -- fiber optic and micro-electromechanical system (MEMS) gyroscopes. The RF switches are also based on MEMS technology and are a natural extension of the microfabrication processes developed for the MEMS gyroscope.
A fiber optic chemical sensor based on gold-island surface plasmon excitation is presented. The sensing part of the fiber is the end of the fiber onto which a thin layer of gold has been deposited to form a particulate surface. Annealing the gold reshapes the particles and produces an optical absorbance near 535 nm with the fiber in air. The optical absorption resonance of the gold particles is shifted if the fiber is immersed in a medium other than air. These resonance shifts are examined by transmission spectroscopy through the fiber. Experimental results for the sensitivity and dynamic range in the measurement of liquid solutions are in agreement with a basic theoretical model which characterizes the surface plasmon using nonretarded electrodynamics.
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