Mr. Michio Kohno Profile

Michio Kohno

Senior Engineer at Canon Inc

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Author

Publications (4)

Proceedings Article | 12 July 2006 Paper

Catadioptric projection optical system for flat panel exposure tool

Michio Kohno, Kiyoshi Fukami, Hitoshi Yoshioka, Shu Watanabe, Akiyoshi Suzuki

Proceedings Volume 6342, 63420Y (2006) https://doi.org/10.1117/12.692265

KEYWORDS: Mirrors, Projection systems, Combined lens-mirror systems, Aspheric lenses, Photomasks, Optical alignment, Distortion, Wavefront aberrations, Iron, Monochromatic aberrations

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Proceedings Article | 26 June 2003 Paper

Development status of a 157-nm full-field scanner

Hitoshi Nakano, Hideo Hata, Hideki Nogawa, Nobuyoshi Deguchi, Michio Kohno, Yuji Chiba

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485509

KEYWORDS: Projection systems, Semiconducting wafers, Oxygen, Reticles, Optical coatings, Transmittance, Birefringence, Crystals, Scanners, Helium

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Proceedings Article | 30 July 2002 Paper

System design of a 157-nm scanner

Hideki Nogawa, Hideo Hata, Michio Kohno

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474609

KEYWORDS: Projection systems, Birefringence, Crystals, Semiconducting wafers, Scanners, Contamination, Wafer-level optics, Reticles, Pellicles, Optical design

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Proceedings Article | 8 August 1993 Paper

Subhalf-micron stepper with a reticle particle monitor

Michio Kohno, Nobuhiro Kodachi, Kazumi Yajima, Seiya Miura

Proceedings Volume 1927, (1993) https://doi.org/10.1117/12.150453

KEYWORDS: Particles, Reticles, Pellicles, Inspection, Semiconducting wafers, Light scattering, Optical lithography, Opacity, Device simulation, Photoresist materials

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