Mr. Michael Balke Profile

Michael Balke

at Technische Univ Braunschweig

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Author

Publications (3)

Proceedings Article | 19 May 2009 Paper

ICP cryogenic dry etching for shallow and deep etching in silicon

Ü. Sökmen, M. Balke, A. Stranz, S. Fündling, E. Peiner, H.-H. Wehmann, A. Waag

Proceedings Volume 7362, 736213 (2009) https://doi.org/10.1117/12.820917

KEYWORDS: Silicon, Etching, Dry etching, Plasma, Thermoelectric materials, Silicon films, Photoresist materials, Cryogenics, Thin films, Oxides

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Proceedings Article | 15 May 2007 Paper

Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

Erwin Peiner, Lutz Doering, Michael Balke, Andreas Christ

Proceedings Volume 6589, 65890M (2007) https://doi.org/10.1117/12.721951

KEYWORDS: Calibration, Sensors, Silicon, Metrology, Glasses, Dimensional metrology, Etching, Atomic force microscopy, Standards development, Wheatstone bridges

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Proceedings Article | 15 May 2007 Paper

A new micromachined sensor system for tactile measurements of high-aspect ratio microstructures

M. Balke, E. Peiner, L. Doering

Proceedings Volume 6589, 65890J (2007) https://doi.org/10.1117/12.724163

KEYWORDS: Sensors, Etching, Calibration, Silicon, Wheatstone bridges, Device simulation, Semiconducting wafers, Resistors, Wet etching, Potassium

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