Melkamu A. Belete
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 29 March 2013 Paper
Proceedings Volume 8685, 86850W (2013) https://doi.org/10.1117/12.2020003
KEYWORDS: Capacitors, Etching, Molybdenum, Oxides, Tin, Lithography, Dielectrics, Reactive ion etching, Semiconducting wafers, Electrodes

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