Dr. Max Lukas Krieg Profile

Dr. Max Lukas Krieg

at Technische Univ Delft

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 13 June 2005 Paper

Measurements from a novel interferometer for EUVL mirror substrates

Max Krieg, Joseph Braat

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612433

KEYWORDS: Interferometers, Mirrors, Optical fibers, Charge-coupled devices, Calibration, Sensors, Phase measurement, Extreme ultraviolet lithography, Wavefronts, Interferometry

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Proceedings Article | 2 August 2004 Paper

Inverse propagation algorithm for angstrom accuracy interferometer

Max Krieg, Joseph Braat

Proceedings Volume 5531, (2004) https://doi.org/10.1117/12.560410

KEYWORDS: Mirrors, Diffraction, Sensors, Interferometers, Ray tracing, Reflectors, Wavefronts, Error analysis, Reflection, Geometrical optics

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Proceedings Article | 8 July 2003 Paper

Fast-sampling multipixel detector for a heterodyne interferometer with angstrom precision

Oleg Soloviev, Gleb Vdovin, Lukas Krieg, Davies de Lima Monteiro, Joseph Braat, Patrick French

Proceedings Volume 5036, (2003) https://doi.org/10.1117/12.498238

KEYWORDS: Sensors, Heterodyning, Interferometers, Error analysis, Phase measurement, Mirrors, Signal processing, Analog electronics, Fourier transforms, Phase shift keying

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Proceedings Article | 30 May 2003 Paper

Three-wavelength laser light source for absolute sub-Angstrom two-point-source interferometer

Max Krieg, Gea Parikesit, Joseph Braat

Proceedings Volume 5144, (2003) https://doi.org/10.1117/12.500414

KEYWORDS: Interferometers, Absorption, Heterodyning, Light sources, Laser stabilization, Helium neon lasers, Phase measurement, Metrology, Mirrors, Iodine

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Proceedings Article | 19 June 2002 Paper

Characterization of the frequency-modulated continuous wave subsystem of an angstrom-accuracy absolute interferometer

Lukas Krieg, Bas Swinkels, Joseph Braat

Proceedings Volume 4778, (2002) https://doi.org/10.1117/12.473536

KEYWORDS: Interferometers, Mirrors, Bragg cells, Polarization, Modulation, Heterodyning, Polarizers, Sensors, Tunable lasers, Linear filtering

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Proceedings Article | 23 October 2001 Paper

Absolute optical path difference measurement with angstrom accuracy over ranges of millimeters

Lukas Krieg, Rene Klaver, Joseph Braat

Proceedings Volume 4398, (2001) https://doi.org/10.1117/12.445541

KEYWORDS: Polarization, Frequency modulation, Fermium, Bragg cells, Tunable lasers, Optical testing, Phase modulation, Heterodyning, Mirrors, Interferometers

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Showing 5 of 6 publications

Conference Committee Involvement (3)

Optical Measurement Systems for Industrial Inspection IV

13 June 2005 | Munich, Germany

Interferometry XII: Applications

4 August 2004 | Denver, Colorado, United States

Optical Measurement Systems for Industrial Inspection III

23 June 2003 | Munich, Germany

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