Mr. Masanori Takahashi Profile

Masanori Takahashi

at Toshiba Corp

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Author

Publications (3)

Proceedings Article | 31 March 2014 Paper

Availability study of CFD-based Mask3D simulation method for next generation lithography technologies

M. Takahashi, Y. Kawabata, T. Washitani, S. Tanaka, S. Maeda, S. Mimotogi

Proceedings Volume 9052, 905215 (2014) https://doi.org/10.1117/12.2046612

KEYWORDS: Radio propagation, Electromagnetism, Wave propagation, Lithography, Photomasks, Computer simulations, Maxwell's equations, Diffraction, Finite-difference time-domain method, Finite element methods

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Proceedings Article | 12 April 2013 Paper

Study of recent CFD-based scheme for analyzing 3D mask effects

M. Takahashi, K. Kodera, M. Motokubota, Y. Kawabata, S. Maeda, S. Nojima, S. Tanaka, S. Mimotogi

Proceedings Volume 8683, 86830B (2013) https://doi.org/10.1117/12.2009116

KEYWORDS: Photomasks, Radio propagation, Electromagnetism, Finite-difference time-domain method, Lithography, Wave propagation, Computer simulations, Diffraction, Wavefronts, Phase velocity

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Proceedings Article | 16 March 2009 Paper

A novel fast 3D resist simulation method using Chebyshev expansion

Masanori Takahashi, Satoshi Tanaka, Shoji Mimotogi, Soichi Inoue

Proceedings Volume 7274, 727432 (2009) https://doi.org/10.1117/12.813606

KEYWORDS: 3D modeling, Convolution, Reflection, Fourier transforms, Optical proximity correction, 3D image processing, Computer simulations, Lithography, Photoresist processing, Critical dimension metrology

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