Dr. Masakazu Kobayashi Profile

Dr. Masakazu Kobayashi

at Gigaphoton Inc

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 10 March 2021 Presentation + Paper

Microprocessing machinability of organic material for semiconductor packaging by 248 nm excimer laser

Akira Suwa, Junichi Fujimoto, Yasufumi Kawasuji, Masakazu Kobayashi, Kouji Kakizaki

Proceedings Volume 11673, 116730Y (2021) https://doi.org/10.1117/12.2578165

KEYWORDS: Excimer lasers, Organic materials, Semiconductors, Semiconductor materials, Organic semiconductors, Packaging, Ultraviolet radiation, Materials processing, Laser development, Thermal effects

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Proceedings Article | 5 March 2021 Presentation

Micro-via fabrication of glass material for semiconductor packaging by 248 nm excimer laser

Yasufumi Kawasuji, Akira Suwa, Yasuhiro Adachi, Masakazu Kobayashi, Kouji Kakizaki, Masakazu Washio

Proceedings Volume 11673, 116730E (2021) https://doi.org/10.1117/12.2578038

KEYWORDS: Glasses, Semiconductors, Semiconductor materials, Packaging, Excimer lasers, Semiconducting wafers, Silicon films, Silicon, Pulsed laser operation, Laser drilling

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Proceedings Article | 22 February 2021 Presentation + Paper

Processability of organic material for semiconductor packaging by 248 nm excimer laser

Akira Suwa, Yasufumi Kawasuji, Masakazu Kobayashi, Kouji Kakizaki, Junichi Fujimoto

Proceedings Volume 11610, 116100W (2021) https://doi.org/10.1117/12.2583901

KEYWORDS: Excimer lasers, Semiconductors, Organic materials, Laser processing, Semiconductor materials, Packaging, Organic semiconductors, Materials processing, Ultraviolet radiation, Photomasks

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Proceedings Article | 25 March 2019 Presentation + Paper

Microprocessing of organic material for semiconductor packaging by 248 nm excimer laser

Akira Suwa, Junichi Fujimoto, Yasufumi Kawasuji, Masakazu Kobayashi, Masashi Shimbori, Takashi Onose, Masaki Arakawa, Akira Mizutani, Hakaru Mizoguchi

Proceedings Volume 10906, 1090609 (2019) https://doi.org/10.1117/12.2510951

KEYWORDS: Excimer lasers, Organic materials, Scanning electron microscopy, Semiconductors, Packaging, Deep ultraviolet, Organic semiconductors, Semiconductor materials, Materials processing, Laser processing

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Proceedings Article | 16 May 2017 Paper

DUV high power lasers processing for glass and CFRP

Masakazu Kobayashi, Kouji Kakizaki, Hiroaki Oizumi, Toshio Mimura, Junichi Fujimoto, Hakaru Mizoguchi

Proceedings Volume 10238, 102381D (2017) https://doi.org/10.1117/12.2266233

KEYWORDS: Excimer lasers, Microscopes, Laser ablation, Scanning electron microscopy, Deep ultraviolet, Laser processing, Glasses, High power lasers, Laser cutting, Manufacturing, Laser drilling, Materials processing, Micromachining

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Proceedings Article | 22 February 2017 Presentation + Paper

193nm high power lasers for the wide bandgap material processing

Junichi Fujimoto, Masakazu Kobayashi, Koji Kakizaki, Hiroaki Oizumi, Toshio Mimura, Takashi Matsunaga, Hakaru Mizoguchi

Proceedings Volume 10097, 100970T (2017) https://doi.org/10.1117/12.2250706

KEYWORDS: Excimer lasers, Deep ultraviolet, Materials processing, High power lasers, Laser processing, Solid state lasers, Semiconductor manufacturing, Reliability, Annealing, Glasses, Laser ablation, Scanning electron microscopy, Infrared lasers, Micromachining, Copper

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Proceedings Article | 9 November 2016 Paper

High power DUV lasers for material processing

Toshio Mimura, Kouji Kakizaki, Hiroaki Oizumi, Masakazu Kobayashi, Junichi Fujimoto, Takashi Matsunaga, Hakaru Mizoguchi

Proceedings Volume 10016, 1001603 (2016) https://doi.org/10.1117/12.2247870

KEYWORDS: Excimer lasers, Laser processing, Deep ultraviolet, Materials processing, High power lasers, Solid state lasers, Heat treatments, Glasses, Pulsed laser operation, Laser bonding

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Showing 5 of 7 publications

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