Ms. Mary Jane Brodsky Profile

Mary Jane Brodsky

at GlobalFoundries

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 1 April 2008 Paper

Reflectivity-induced variation in implant layer lithography

Todd Bailey, Greg McIntyre, Bidan Zhang, Ryan Deschner, Sohan Mehta, Won Song, Hyung-Rae Lee, Yu Hue, MaryJane Brodsky

Proceedings Volume 6924, 69244F (2008) https://doi.org/10.1117/12.773102

KEYWORDS: Critical dimension metrology, Oxides, Reflectivity, Lithography, Semiconducting wafers, Photomasks, Chemical mechanical planarization, Silicon, Control systems, Etching

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Proceedings Article | 12 May 2005 Paper

First microprocessors with immersion lithography

D. Gil, T. Bailey, D. Corliss, M. Brodsky, P. Lawson, M. Rutten, Z. Chen, N. Lustig, T. Nigussie, K. Petrillo, C. Robinson

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.598855

KEYWORDS: Semiconducting wafers, Immersion lithography, Scanners, Lithography, Critical dimension metrology, Semiconductor manufacturing, Manufacturing, Bacteria, Resistance, Polishing

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Proceedings Article | 5 May 2005 Paper

Process-window sensitive full-chip inspection for design-to-silicon optimization in the sub-wavelength era

Mary Jane Brodsky, Scott Halle, Vickie Jophlin-Gut, Lars Liebmann, Don Samuels, Gary Crispo, Kourosh Nafisi, Vijay Ramani, Ingrid Peterson

Proceedings Volume 5756, (2005) https://doi.org/10.1117/12.599865

KEYWORDS: Reticles, Inspection, Modulation, Resolution enhancement technologies, Optical proximity correction, Photomasks, Semiconducting wafers, Lithography, Manufacturing, Optical lithography

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