This course provides a comprehensive introduction to APC that will enable process control engineers to tackle the control issues they are facing in their manufacturing environments. Specifically, the participants will be introduced to the fundamentals of process control and fault detection and classification (FDC). The basic introduction will be supplemented with class exercises where participants will be involved in developing Run-to-Run control loops and FDC systems for semiconductor manufacturing processes such as deposition, polishing, litho and etch. Additionally, we will present a multi-scale approach to process control, where unit-level control is highlighted and differentiated from module-level (combination of 2 or more unit-level control loops) process control. The material is presented through a blend of theory, specific case studies, and the development of a check-list that will identify the type of APC system appropriate for various circumstances.