CONFERENCE PROCEEDINGS
Advanced Search
Dr. Lulu Zhang
at AIST
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 13 November 2002 Paper
Resonant-type microscanners fabricated by hybrid PZT deposition process on SOI wafers
Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469675
KEYWORDS: Ferroelectric materials, Mirrors, Sol-gels, Silicon, Laser ablation, Semiconducting wafers, Silicon films, Polarization, Actuators, Scanning electron microscopy
Proceedings Article | 13 November 2002 Paper
Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation
Proceedings Volume 4934, (2002) https://doi.org/10.1117/12.469049
KEYWORDS: Ferroelectric materials, Sol-gels, Laser ablation, Thin films, Dielectric polarization, Dielectrics, Fabrication, Excimer lasers, Crystals, Perovskite
Proceedings Article | 9 July 2001 Paper
Structural formation of the lead zirconate titanate formed in pulsed-laser ablation deposition
Masaaki Ichiki, Lulu Zhang, Zhanjie Wang, Yasushi Morikawa, Makoto Tanaka, Ryutaro Maeda
Proceedings Volume 4467, (2001) https://doi.org/10.1117/12.432952
KEYWORDS: Ferroelectric materials, Scanning electron microscopy, Lead, Annealing, Crystals, Heat treatments, X-ray diffraction, Laser ablation, Deposition processes, Perovskite
Proceedings Article | 5 April 2001 Paper
Microscanner actuated by double PZT thin film
Lulu Zhang, Wenmei Lin, Ryutaro Maeda
Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425394
KEYWORDS: Ferroelectric materials, Electrodes, Scanners, Thin films, Sol-gels, Heat treatments, Etching, Dielectrics, Silicon, Mirrors
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top