Dr. Lukasz Urbanski
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 27 September 2013 Paper
W. Li, V. Martinez Esquiroz, D. Patel, L. Urbanski, C. Menoni, J. Rocca, A. Stein, W. Chao, E. Anderson, M. Marconi
Proceedings Volume 8849, 88490W (2013) https://doi.org/10.1117/12.2024472
KEYWORDS: Photomasks, Lithography, Nanolithography, Nanostructures, X-ray lasers, Photoresist materials, Extreme ultraviolet, Coherence imaging, Printing, Imaging systems

Proceedings Article | 5 October 2011 Paper
Proceedings Volume 8140, 81400Y (2011) https://doi.org/10.1117/12.892929
KEYWORDS: Capillaries, X-ray lasers, Visibility, Interferometers, Mirrors, Plasmas, Temporal coherence, Laser applications, Solids, Argon

Proceedings Article | 5 October 2011 Paper
Proceedings Volume 8140, 81400T (2011) https://doi.org/10.1117/12.892855
KEYWORDS: Photomasks, Mirrors, Spherical lenses, Capillaries, X-ray lasers, Photoresist materials, Extreme ultraviolet, Nanostructures, Photography, Diffraction

Proceedings Article | 15 December 2010 Paper
Proceedings Volume 7746, 774609 (2010) https://doi.org/10.1117/12.880340
KEYWORDS: Extreme ultraviolet, Holograms, Spatial resolution, Diffraction, Image resolution, Holography, 3D image reconstruction, Photoresist materials, Photomasks, Microscopes

Proceedings Article | 29 September 2009 Paper
Proceedings Volume 7451, 74510J (2009) https://doi.org/10.1117/12.825509
KEYWORDS: Capillaries, Holography, Lithography, Photoresist materials, Printing, Nanostructures, Photomasks, Interferometry, X-ray lithography, Coherence imaging

Showing 5 of 8 publications
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