Prof. Luiz O. S. Ferreira Profile

Prof. Luiz O. S. Ferreira

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 17 November 2008 Paper

A planar monolithic large size resonant scanning mirror actuated by electromagnetic induction

Luiz C. M. Oliveira, Luiz O. S. Ferreira

Proceedings Volume 7266, 726606 (2008) https://doi.org/10.1117/12.807309

KEYWORDS: Mirrors, Electromagnetism, Magnetism, Opto mechatronics, Current controlled current source, Ions, Interferometric synthetic aperture radar, Manufacturing, Actuators, Mechanical efficiency

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Proceedings Article | 1 August 2005 Paper

Electromagnetic and structural FEA modeling of induction actuated scanning mirrors

L. Oliveira, K. Ahmida, L. Ferreira

Proceedings Volume 5873, (2005) https://doi.org/10.1117/12.620634

KEYWORDS: Finite element methods, Magnetism, Electromagnetism, Scanners, Actuators, Mirrors, Chemical elements, Instrument modeling, Laser Doppler velocimetry, Doppler effect

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Proceedings Article | 30 September 2003 Paper

Silicon micromachined double-rotor scanning mirror

L. de Oliveira, Luiz Ferreira

Proceedings Volume 5264, (2003) https://doi.org/10.1117/12.515430

KEYWORDS: Scanners, Silicon, Mirrors, Magnetism, Silicon films, Electromagnetism, Nanolithography, Thin films, Semiconducting wafers, Resistance

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Proceedings Article | 18 October 2002 Paper

Micromachined scanner actuated by electromagnetic induction

Pedro Barbaroto, Luiz Ferreira, Ioshiaki Doi

Proceedings Volume 4902, (2002) https://doi.org/10.1117/12.467641

KEYWORDS: Magnetism, Scanners, Silicon, Electromagnetism, Prototyping, Manufacturing, Gold, Mirrors, Lithography, Electroplating

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Proceedings Article | 20 August 2001 Paper

Thick silicon membranes as mask blank for SU-8 x-ray deep lithography

Izaque Maia, Luis Ferreira, Maria Helena Piazzetta, Graziele Natal

Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436681

KEYWORDS: Photomasks, Silicon, X-ray lithography, X-rays, Lithography, Gold, Polymethylmethacrylate, Photoresist materials, Synchrotrons, Silicon films

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Conference Committee Involvement (1)

Optomechatronic Systems IV

28 October 2003 | Providence, RI, United States

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