Prof. Lixin Zhao Profile

Prof. Lixin Zhao

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Publications (4)

Proceedings Article | 4 December 2020 Paper

Synchronization control based on phase compensation of tracking error of wafer and reticle stage in step and scan lithographic equipment

Lanlan Li, Song Hu, Lixin Zhao, Jianchao Li, Xiongxing Zhang

Proceedings Volume 11617, 116171Q (2020) https://doi.org/10.1117/12.2585207

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Proceedings Article | 23 August 2017 Presentation + Paper

Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry

Yi Zhou, Yan Tang, Qinyuan Deng, Lixin Zhao, Song Hu

Proceedings Volume 10373, 103730G (2017) https://doi.org/10.1117/12.2280001

KEYWORDS: Modulation, Dimensional metrology, Interferometry, Integrated circuits, Chemistry

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Proceedings Article | 25 October 2016 Paper

UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication

Qian Deng, Junbo Liu, Shaolin Zhou, Yan Tang, Lixin Zhao, Song Hu, Yinghong Chen

Proceedings Volume 9685, 96850M (2016) https://doi.org/10.1117/12.2243456

KEYWORDS: Ultraviolet radiation, Lithography, Lithographic illumination, Photomasks, Ions, Diffraction, UV optics, Nanoimprint lithography, Second-harmonic generation, Semiconducting wafers

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Proceedings Article | 25 October 2016 Paper

High precision locating control system based on VCM for Talbot lithography

Jingwei Yao, Lixin Zhao, Qian Deng, Song Hu

Proceedings Volume 9685, 96850L (2016) https://doi.org/10.1117/12.2243616

KEYWORDS: Control systems, Lithography, Digital signal processing, Control systems design, Signal processing, Feedback control, Device simulation, Mathematical modeling, Electromagnetism, Servomechanisms

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