Mr. Lior Levin Profile

Lior Levin

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Publications (2)

Proceedings Article | 5 April 2007 Paper

Immersion-induced defect SEM-based library for fast baseline improvement and excursion

Ilan Englard, Raf Stegen, Erik Van Brederode, Peter Vanoppen, Ingrid Minnaert-Janssen, Frank Duray, Ted der Kinderen, Gazi Tanriseven, Inge Lamers, Mireia Blanco Mantecon, Lior Levin, Eitan Binyamini, Nurit Raccah, Shalev Dror, Eran Valfer, Ofer Rotlevi, Robert Schreutelkamp, Rich Piech

Proceedings Volume 6518, 65182G (2007) https://doi.org/10.1117/12.713466

KEYWORDS: Particles, Inspection, Scanning electron microscopy, Immersion lithography, Bridges, Library classification systems, Printing, Molecular bridges, Semiconducting wafers, Signal attenuation

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Proceedings Article | 29 April 2004 Paper

Integrated electrical and SEM-based defect characterization for rapid yield ramp

Jacob Orbon, Lior Levin, Ofer Bokobza, Rinat Shimshi, Manjari Dutta, Brian Zhang, Dennis Ciplickas, Teri Pham, Jim Jensen

Proceedings Volume 5378, (2004) https://doi.org/10.1117/12.536469

KEYWORDS: Failure analysis, Inspection, Statistical analysis, Scanning electron microscopy, Visualization, Electrical breakdown, Diffractive optical elements, Semiconducting wafers, Back end of line, Metals

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