Mr. Linxian Zhan Profile

Linxian Zhan

at Xiamen Univ

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Publications (3)

Proceedings Article | 4 January 2008 Paper

Charge accumulation in composite dielectric layers in capacitive RF MEMS switches

Linxian Zhan, Haisheng San, Gang Li, Peng Xu, Xuyuan Chen

Proceedings Volume 6836, 68360Z (2008) https://doi.org/10.1117/12.756133

KEYWORDS: Dielectrics, Composites, Microelectromechanical systems, Switches, Silicon, Silica, Plasma enhanced chemical vapor deposition, Capacitance, Silicon films, Metals

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Proceedings Article | 4 January 2008 Paper

Influence of ion implantation on dielectric charging in capacitive RF MEMS switches

Gang Li, Linxian Zhan, Haisheng San, Peng Xu, Xuyuan Chen

Proceedings Volume 6836, 68360J (2008) https://doi.org/10.1117/12.756276

KEYWORDS: Dielectrics, Switches, Microelectromechanical systems, Ion implantation, Ions, Silicon, Silicon films, Capacitors, Low pressure chemical vapor deposition, Reliability

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Proceedings Article | 4 January 2008 Paper

Actuation voltage wave-form dependence of charge accumulation in RF MEMS switches

Haisheng San, Linxian Zhan, Peng Xu, Gang Li, Xuyuan Chen

Proceedings Volume 6836, 68360K (2008) https://doi.org/10.1117/12.756390

KEYWORDS: Switches, Dielectrics, Microelectromechanical systems, Bridges, Capacitors, Silicon, Metals, Reliability, Capacitance, Aluminum

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