In the latest 20 years, for the needed of the inertial confinement fusion(ICF) created by laser, the grazing incident
microscopes are more interested., KBA x-ray microscope is preferred among the ICF diagnostic experiment devices. In
order to study the ICF experiment (energy range abour the energy 0-3keV), we design and manufacture a set of KBA
microscope. The resolution of 5μm can be obtained in the 2 mm field of view. According to the effective blur diameters,
we establish the tolerances. We also analyze the reflectivity of two manufacturing methods. Taking the non-coaxial
grazing incident KBA microscope designed as an example, x-ray reflecting from metal surface and single film layer are
discussed. At a wavelength of 0.83 nm, the influence of the surface root-mean-square roughness (RMS) on reflectivity is
analyzed, and x- ray reflectivity of this system is calculated. The results illustrate that reflectivity decreases with RMS
increasing. Reflectivity of Cu is 0.021 and that of single film layer is 0.049, thus KBA X-ray microscope is made of
single film layer. It met the requirement of the needed.
In the last 20 years, x-ray imaging technology has developed to meet the needs of x-ray photoetching, spatial exploration, high-energy physics, and diagnosis of inertial confinement fusion. Because conventional imaging methods are not suitable in the x-ray range, grazing reflective imaging and coded aperture imaging methods have been adopted. In this paper, we describe the design of a noncoaxial grazing incidence KBA microscope. The microscope consists of two sets of spherical mirrors that scatter in orthogonal planes. An optical ray tracing program is used to analyze and evaluate the theoretical aberrations of the microscope. This allows us to optimize the x-ray imaging system. The analytical results provide a reliable foundation for determining the useful range and the manufacturing and assembly tolerances of the microscope.
In the latest 20 years, x-ray imaging technology has developed fast in order to meet the need of x-ray photo-etching, spatial exploration technology, high-energy physics, procedure diagnosis of inertial confinement fusion (ICF) etc. But, Since refractive index of materials in the x-ray region is lower than 1, and x-ray is strongly absorbed by the materials, it is very difficult to image objects in the x ray region. Conventional imaging methods are hardly suitable to x-ray range. Generally, grazing reflective imaging and coding aperture imaging methods have been adopted more and more. In this paper, non-coaxial grazing reflective imaging KB and KBA microscope systems are discussed in detail, and an x-ray microscope consisting of four mirrors working at grazing incidence is designed. It is an anastigmatic system, and the oblique angle of the image is evidently decreased. The resolution of 5-7 can be obtained within 2 field of view. And finally we also make analysis of the key problems that are met in the processing of manufacturing this system are analyzed.
In the latest 20 years, x-ray imaging technology has developed fast in order to meet the need of x-ray photo-etching, spatial exploration technology, high-energy physics, procedure diagnosis of inertial confinement fusion (ICF) et al. Since refractive index of materials in the x-ray region is lower than 1, and x-ray is strongly absorbed by materials, it is very difficult to image objects in the x-ray region. Conventional imaging methods are hardly suitable to x-ray range. In general, grazing reflective imaging and coding aperture imaging methods have been adopted more and more. In this paper, according to user’s requirement, we have designed a non-coaxial grazing KBA microscope. The microscope consists of two sets of perpendicular spherical mirrors, each set includes two parallel mirrors. Taking it as an example, we have compiled an optical computing program for the non-coaxial grazing imaging systems so as to analyze and evaluate aberrations of KBA microscope. Thus it can help us to get an optimal comprehension of KBA x-ray imaging system. In the same time, the analytical results provide reliable foundation for evaluating imaging quality of KBA microscope.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.