Prof. Libo Zhao Profile

Prof. Libo Zhao

at Xi'an Jiaotong Univ.

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Publications (2)

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Proceedings Article | 24 June 2021 Paper

Research on MEMS biaxial electromagnetic micromirror based on radial magnetic field distribution

Chen Li, Shihao Xu, Libo Zhao, Guanghua Cheng

Proceedings Volume 11885, 1188510 (2021) https://doi.org/10.1117/12.2602278

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An electromagnetically actuated dual-axis MEMS scanning micromirror for lidar applications is introduced, besides a novel radial magnetic field actuation system is designed. The dual-axis scanning micromirror with large aperture which the plate size of 2.6 mm in diameter was realized utilizing patterned single-turn electroplated copper coils, which combined with a concentric permanent magnet assembly forming radial magnetic field. Based on the basic of this working principle, the displacement response outputs of different torsion beam structures were compared by theoretical analysis and finite element simulation. The serpentine elastic beam was chosen as the external torsion axis of the micromirror device because of its large displacement output. The coupling magnetic field of the permanent magnet assembly was analyzed and simulated to achieve the maximum magnetic field intensity at the coils. Horizontal resonance frequency of the presented micromirror was 3376.2 Hz and vertical resonance frequency was 419.46 Hz, in addition, maximum deflection angle of approximately ±25.2°in horizontal direction and about ±17.4°in vertical direction were achieved at resonance. The design of the micromirror meets the requirements of MEMS lidar for large mirror size and wide scanning field of view.

Proceedings Article | 4 December 2020 Paper

Design and optimization of a novel resonant gauge pressure sensor

Li Wang, Yuxiang Qiu, Xiangguang Han, Cuilan Chen, Mimi Huang, Ping Yang, Zhikang Li, Libo Zhao, Zhuangde Jiang

Proceedings Volume 11617, 116172V (2020) https://doi.org/10.1117/12.2585386

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Resonant pressure sensors are widely used in high precision pressure measurement, but they are mainly focused on the measurements of absolute pressure at present. The fluctuation of atmospheric pressure disturbs the accuracy of gauge pressure sensor. Therefore, a resonant gauge pressure sensor with a double-ended tuning fork resonator is proposed based on wafer level anodic bonding method. To sense the gauge pressure with high accuracy when the resonator is set inside the diaphragm, a novel composite diaphragm structure is proposed with the glass vacuum package layer involved in the pressure-lead diaphragm deflection. The resonator is laterally electromagnetically driven to symmetry mode and electromagnetically detected. With finite element analysis simulation, the effects of several key factors on the measuring accuracy of gauge pressure sensor are discovered and optimized. Research results show that the frequency detection error caused by the fluctuation of atmospheric pressure is reduced by changing the area of bonded area above the resonator and the glass thickness. The simulated non-linearity of proposed sensor after quadratic polynomial fitting is less than 0.01% FS with the pressure range of 0-2.5 MPa, and its measuring sensitivity is up to 3996.6 Hz/MPa.

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