Prof. Libo Zhao Profile

Prof. Libo Zhao

at Xi'an Jiaotong Univ.

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 4 November 2024 Paper

Structure optimization analysis of MEMS microphone packaging shell

Jiazhu Li, Shiwang Zhang, Shaohui Qin, Jiawei Yuan, Zixuan Li, Zheng Yuan, Zilong Zhao, Ruiyan Luo, Hongqiang Tan, Yihe Zhao, Jie Li, Wendi Gao, Zhikang Li, Libo Zhao

Proceedings Volume 13420, 1342010 (2024) https://doi.org/10.1117/12.3055244

KEYWORDS: Vacuum chambers, Frequency response, Scanning probe lithography, Microelectromechanical systems, Packaging, Acoustics, 3D modeling, Clouds, Design, Acoustic waves

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Proceedings Article | 4 November 2024 Paper

Modeling and optimization of MEMS microphone dust protection mesh for improved for acoustic performance using finite element method simulation

Shiwang Zhang, Jiazhu Li, Jiawei Yuan, Zixuan Li, Zheng Yuan, Shaohui Qin, Zilong Zhao, Hongqiang Tan, Ruiyan Luo, Yihe Zhao, Jie Li, Wendi Gao, Zhikang Li, Libo Zhao

Proceedings Volume 13420, 134201F (2024) https://doi.org/10.1117/12.3055243

KEYWORDS: Acoustics, Acoustic waves, Microelectromechanical systems, Design, Finite element methods, 3D modeling, Vibration, Signal attenuation, Displays, Materials properties

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