Dr. Le Guan Profile

Dr. Le Guan

at Dalian Univ of Technology

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Author

Publications (4)

SPIE Journal Paper | 17 February 2015

Integrated polarization-dependent sensor for autonomous navigation

Ze Liu, Ran Zhang, Zhiwen Wang, Le Guan, Bin Li, Jinkui Chu

JM3, Vol. 14, Issue 01, 015001, (February 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.1.015001

KEYWORDS: Sensors, CMOS sensors, Polarizers, Polarization, Nanoimprint lithography, Navigation systems, Dielectric polarization, Nanolithography, Error analysis, Nanowires

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SPIE Journal Paper | 6 February 2014

Microgripping force measuring device based on SU-8 microcantilever sensor

Ran Zhang, Jinkui Chu, Le Guan, Shuangliang Li, Jian Min

JM3, Vol. 13, Issue 01, 013007, (February 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.1.013007

KEYWORDS: Sensors, Calibration, Measurement devices, Sensor calibration, Copper, Silicon, Resistance, Photoresist materials, Semiconducting wafers, Metals

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SPIE Journal Paper | 3 September 2013

Specimen alignment of micro-tensile testing using vernier-groove carrier or specimen with piezoresistive cells

Duanqin Zhang, Jianxiu Liu, Le Guan, Jinkui Chu

JM3, Vol. 12, Issue 03, 033017, (September 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.3.033017

KEYWORDS: Optical alignment, Silicon, Etching, Photomicroscopy, Microscopes, Bulk micromachining, Micromachining, Resistance, Reliability, Microelectromechanical systems

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SPIE Journal Paper | 1 June 2012

Mechanical characterization of SU-8 thin films through varying effective aspect ratios for microelectromechanical systems application

Jinkui Chu, Jiali Gao, Le Guan, Guoqing Zhang, Ze Liu

JM3, Vol. 11, Issue 02, 023006, (June 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.2.023006

KEYWORDS: Thin films, Photoresist materials, Microelectromechanical systems, Numerical simulations, Testing and analysis, Semiconducting wafers, Photomicroscopy, Ultraviolet radiation, Polymers, Finite element methods

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