Dr. Kumi Motai Profile

Dr. Kumi Motai

at Hitachi Ltd

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Publications (2)

Proceedings Article | 22 March 2007 Paper

Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror

Kumi Motai, Hiroaki Oizumi, Shinji Miyagaki, I. Nishiyama, Akira Izumi, Tomoya Ueno, Yasuo Miyazaki, Akira Namiki

Proceedings Volume 6517, 65170F (2007) https://doi.org/10.1117/12.711998

KEYWORDS: Hydrogen, Ruthenium, Extreme ultraviolet, Reflectivity, Oxides, Mirrors, Plasma, Extreme ultraviolet lithography, Protactinium, Oxidation

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Proceedings Article | 23 March 2006 Paper

Impact of multi-layer deposition method on defects for EUVL photomask blanks

Jerry Cullins, Kumi Motai, Iwao Nisiyama

Proceedings Volume 6151, 61511X (2006) https://doi.org/10.1117/12.656931

KEYWORDS: Photomasks, Ion beams, Sputter deposition, Transmission electron microscopy, Deposition processes, Atomic force microscopy, Ions, Extreme ultraviolet lithography, Etching, Manufacturing

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