Dr. Konstantin Nikolaev Profile

Dr. Konstantin Nikolaev

at Physikalisch-Technische Bundesanstalt

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Publications (1)

Proceedings Article | 20 March 2020 Paper

Sensitivity analysis for the detection of pitchwalk in self-aligned quadruple patterning by GISAXS

Maren Casfor Zapata, Nando Farchmin, Mika Pflüger, Konstantin Nikolaev, Victor Soltwisch, Sebastian Heidenreich, Christian Laubis, Michael Kolbe, Frank Scholze

Proceedings Volume 11325, 113251D (2020) https://doi.org/10.1117/12.2552037

KEYWORDS: Diffraction, Finite element methods, Scattering, Inverse problems, X-rays

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