Dr. Kolja Haberland Profile

Dr. Kolja Haberland

CTO at LayTec AG

SPIE Involvement:

Conference Program Committee | Author

Publications (4)

Proceedings Article | 13 March 2024 Presentation

Tight process control of LED and laser structures: the potential of connected metrology in semiconductor device production

Kolja Haberland

Proceedings Volume PC12906, PC1290603 (2024) https://doi.org/10.1117/12.3001649

KEYWORDS: Metrology, Plasma etching, Process control, Light emitting diodes, Semiconductors, Semiconductor lasers, Laser metrology, Semiconducting wafers, Plasma, Etching

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Proceedings Article | 5 March 2021 Presentation

Progress in in-situ metrology for epitaxy of LEDs and laser-structures

Kolja Haberland

Proceedings Volume 11706, 1170610 (2021) https://doi.org/10.1117/12.2575979

KEYWORDS: Light emitting diodes, Metrology, Epitaxy, Laser metrology, Optical semiconductors, Optics manufacturing, Yield improvement, Process control, Semiconductors, Reflectance spectroscopy

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Proceedings Article | 9 March 2020 Presentation

Advances in in-situ metrology during epitaxy of UV-LEDs and related optical devices (Conference Presentation)

Kolja Haberland

Proceedings Volume 11302, 1130219 (2020) https://doi.org/10.1117/12.2542676

KEYWORDS: Metrology, Epitaxy, Optical components, Semiconducting wafers, Light emitting diodes, Pyrometry, Reflectometry, Metals, Vapor phase epitaxy, Temperature metrology

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Proceedings Article | 8 March 2016 Paper

Process control of MOCVD growth for LEDs by in-situ photoluminescence

C. Prall, K. Haberland, C. Kaspari, F. Brunner, M. Weyers, D. Rueter

Proceedings Volume 9768, 97681A (2016) https://doi.org/10.1117/12.2209479

KEYWORDS: Quantum wells, Semiconducting wafers, Luminescence, Indium gallium nitride, Light emitting diodes, Gallium nitride, Metalorganic chemical vapor deposition, Temperature metrology, Line scan image sensors, Near ultraviolet

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Conference Committee Involvement (9)

Light-Emitting Devices, Materials, and Applications XXIX

25 January 2025 | San Francisco, California, United States

Light-Emitting Devices, Materials, and Applications XXVIII

29 January 2024 | San Francisco, California, United States

Light-Emitting Devices, Materials, and Applications XXVII

30 January 2023 | San Francisco, California, United States

Light-Emitting Devices, Materials, and Applications XXVI

24 January 2022 | San Francisco, California, United States

Light-Emitting Devices, Materials, and Applications XXV

6 March 2021 | Online Only, California, United States

Showing 5 of 9 Conference Committees

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